Infrared Absorption Cooling Plate for Display Substrate Temperature Control
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Solution Overview
Problem
The challenge in manufacturing organic electroluminescent (EL) displays is accurately controlling the substrate temperature during film formation by vapor deposition, which affects the positional accuracy of each layer due to thermal expansion and the complexity of forming multilayered structures with different light-emitting layers.
Innovation Solution
The use of a cooling plate with an infrared absorption layer, positioned to face the insulating substrate, absorbs infrared radiation and efficiently cools the substrate before and during film formation, maintaining a stable temperature and ensuring precise layer positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the insulating substrate is heated in vacuum for drying before film formation, then the substrate is dried effectively, but the substrate temperature remains high during film formation causing thermal expansion and reducing positional accuracy
Solution Approach 1:
The substrate is dried in advance in a separate heating step before film formation. After drying, the substrate is cooled down to room temperature or lower before the vapor deposition process begins, ensuring that film formation occurs on a thermally stable substrate that will not expand during the process.
Solution Approach 2:
The manufacturing process is divided into separate stages: a drying stage with heating, followed by a cooling stage, and then the film formation stage. This segmentation allows the substrate to be dried effectively while ensuring it returns to a stable temperature before film deposition, preventing thermal expansion issues during the critical film formation process.
2Adaptability or versatility
If film formation is performed multiple times to create multilayered structures, then the display element functionality is achieved, but the substrate temperature accumulates and becomes difficult to control
Solution Approach 1:
Between each film formation step in the multilayered structure fabrication, the substrate is periodically cooled back to the initial temperature. This periodic cooling prevents temperature accumulation across multiple deposition steps, ensuring that each layer is formed on a thermally stable substrate with consistent dimensional properties.
Solution Approach 2:
Before each subsequent film formation step, the substrate is cooled down to the predetermined temperature. This preliminary cooling action ensures that the substrate is in a stable thermal state before the next layer is deposited, preventing temperature-related positional deviations even when forming multiple layers.
3Ease of manufacture
If the substrate temperature is not controlled during film formation, then the process is simpler, but the thermal expansion of the substrate causes layers to be formed in incorrect positions
Solution Approach 1:
The substrate temperature is controlled in advance by cooling it to a predetermined temperature before film formation begins. This preliminary temperature control ensures that the substrate is thermally stable during deposition, preventing expansion-related positioning errors without adding complexity to the film formation process itself.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for accurate temperature control of the substrate, enhancing the positional accuracy of each thin film layer and enabling the formation of multilayered structures with precise alignment, thus improving the overall performance of the organic EL display.
Implementation Method 1
arranging a cooling plate which comprises a metal substrate and an infrared absorption layer covering a main surface of the metal substrate and being larger in infrared absorptance than the metal plate such that the infrared absorption layer faces the insulating substrate
Implementation Method 2
cooling the insulating substrate before and/or during formation of the patterned layer by arranging a cooling plate which comprises a metal substrate and an infrared absorption layer covering a main surface of the metal substrate
Implementation Method 3
forming a patterned layer as a portion of the structure on the insulating substrate by vapor deposition in vacuum using a mask
Data Source
AI summary
Provided is a method of manufacturing a display which includes an insulating substrate and a structure formed on the insulating substrate and including a display element, including forming a patterned layer as a portion of the structure on the insulating substrate by vapor deposition in vacuum using a mask, and cooling the insulating substrate before and/or during formation of the patterned layer by arranging a cooling plate which comprises a metal substrate and an infrared absorption layer covering a main surface of the metal substrate and being larger in infrared absorptance than the metal plate such that the infrared absorption layer faces the insulating substrate.