Infrared Heating Apparatus for Color Filter Substrate Fabrication

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Solution Overview

Problem

The existing methods for fabricating color filter substrates, particularly for LCDs, are inefficient due to the lengthy post-baking process using thermal convection, which requires significant clean room space, operating expenses, and equipment investment, and involves repeated processes that consume resources and time, necessitating the use of a carrier robot for multiple substrates.

Innovation Solution

The method involves substituting the post-baking process with infrared irradiation for rapid thermal transfer, using an infrared heating apparatus that includes radiation heaters, reflectors, and a controller to control heating time, allowing for simultaneous heating of multiple substrates without a carrier robot, reducing the need for extensive clean room space and equipment investment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If thermal convection method is used for post-baking process, then the substrate can be heated uniformly, but the heating time becomes significantly long (30 minutes or more)

Engineering Contradiction:

Improvesubstrate temperatureVSAvoidheating time

Core Design Contradiction:

TemperatureVSLoss of time

Solution Approach 1:

The patent replaces the thermal convection heating method with infrared radiation heating. Instead of using a convection mediator (gas) to transfer heat mechanically through the chamber, the invention directly irradiates infrared rays onto the substrate surface, enabling rapid and uniform heating without the time-consuming convection process.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The infrared heating apparatus uses periodic irradiation of infrared rays to rapidly heat the substrate. The controller regulates the infrared radiation in periodic cycles, allowing the substrate to reach the required temperature (230°C or less) much faster than continuous thermal convection while maintaining uniform heating.

Inventive Principle:

Principle #19Periodic action

2Productivity

If multiple substrates are loaded into one chamber for post-baking process, then production efficiency improves, but the time necessary for temperature rise is increased significantly and carrier robot is required

Engineering Contradiction:

Improveproduction efficiencyVSAvoidtemperature rise time

Core Design Contradiction:

ProductivityVSLoss of time

Solution Approach 1:

The patent merges multiple substrate processing operations into a single infrared heating chamber. Multiple substrates can be simultaneously irradiated with infrared rays, and since infrared heating does not require chamber-wide convection, the temperature rise time does not significantly increase even with multiple substrates present, eliminating the need for carrier robots.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

Each substrate serves as its own heating target for infrared radiation. The infrared rays directly penetrate and heat each substrate independently without requiring a convection medium to distribute heat throughout the chamber, allowing multiple substrates to be processed simultaneously without increasing overall heating time.

Inventive Principle:

Principle #25Self-service

3Reliability

If repeated post-baking processes are performed for each color filter (R, G, B), then each pattern can be properly hardened, but clean room space, operating expenses, and equipment investment are consumed several times

Engineering Contradiction:

Improvepattern hardening qualityVSAvoidclean room space

Core Design Contradiction:

ReliabilityVSArea of stationary object

Solution Approach 1:

The infrared heating apparatus is designed as a universal post-baking device that can process all color filter patterns (R, G, B) with the same rapid heating mechanism. This single multi-functional apparatus replaces the need for multiple separate post-baking chambers, significantly reducing clean room space and equipment investment while maintaining reliable pattern hardening for all color filters.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces the heating time, minimizes resource consumption, and enhances production efficiency by allowing for rapid and uniform heating of color filter patterns, improving yield and productivity while eliminating the need for a carrier robot and reducing turnaround time.

Implementation Method 1

curing the color filter pattern by irradiating the substrate with infrared rays

Methodology Applied

Scientific EffectInfrared radiation: Infrared Radiation

Implementation Method 2

substituting the post-baking process with infrared irradiation for rapid thermal transfer

Methodology Applied

Scientific EffectRapid thermal transfer: Thermal Radiation

Data Source

PatentUS8669024B2Method of fabricating color filter substrate and infrared heating apparatus for the same

Publication Date: 2014.03.11 LG DISPLAY CO LTD

AI summary

A method of fabricating a color filter substrate and an infrared heating apparatus for the same are provided. A post-baking process is replaced with an infrared irradiation method with a rapid thermal transfer characteristic. Therefore, the yield and production efficiency can be improved. The method of fabricating a color filter substrate includes coating a color resist layer on an entire surface of a substrate, placing a mask on the substrate and exposing the substrate, developing the exposed color resist layer to form a color filter pattern, and curing the color filter pattern by irradiating the substrate with infrared rays.