Infrared Communication for Semiconductor Processing Apparatus

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Solution Overview

Problem

Existing processing apparatuses face challenges in synchronizing processing conditions between multiple units without information leakage, especially when using wireless communication, and face difficulties in adding or rearranging units due to cable constraints in wired communication.

Innovation Solution

A processing apparatus utilizing infrared transmission and reception means to transfer apparatus information between units, allowing for secure, wireless communication without information leakage and enabling easy reconfiguration of unit layouts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If wireless communication (Wi-Fi or Bluetooth) is used to transfer apparatus information between processing apparatuses, then the burden of manually inputting processing conditions is reduced, but apparatus information may be leaked to outdoors

Engineering Contradiction:

Improveburden of inputting processing conditionVSAvoidinformation leakage

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The patent replaces wireless electromagnetic communication (Wi-Fi/Bluetooth) with infrared optical communication. This substitution uses infrared radiation instead of radio waves, creating a directional communication channel that does not propagate outdoors, thereby eliminating information leakage risk while maintaining automated data transfer functionality.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent applies directional communication by orienting infrared transmission and reception sections toward each other between adjacent processing apparatuses. This creates a localized communication channel confined to the space between specific apparatuses, preventing information from leaking to outdoor environments while enabling automated data transfer.

Inventive Principle:

Principle #3Local quality

2Object-affected harmful factors

If wired communication using cables is used to transfer apparatus information between processing apparatuses, then information leakage is prevented, but it becomes difficult to add processing apparatuses and change their layout

Engineering Contradiction:

Improveinformation leakageVSAvoidease of adding and reconfiguring apparatuses

Core Design Contradiction:

Object-affected harmful factorsVSAdaptability or versatility

Solution Approach 1:

The patent replaces physical cable connections with infrared optical communication. This eliminates the need for wired connections, allowing processing apparatuses to be freely added, removed, or repositioned without being constrained by cable routing, while maintaining secure information transfer through directional infrared beams.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent enables dynamic reconfiguration of processing apparatus layouts by using wireless infrared communication instead of fixed cable connections. Apparatuses can be moved or repositioned flexibly, and the infrared communication links can be easily reestablished between adjacent apparatuses without physical connection constraints.

Inventive Principle:

Principle #15Dynamics

3Object-affected harmful factors

If wired communication using cables is used, then information leakage is prevented, but aesthetic appearance is damaged by the cables

Engineering Contradiction:

Improveinformation leakageVSAvoidaesthetic appearance

Core Design Contradiction:

Object-affected harmful factorsVSShape

Solution Approach 1:

The patent replaces visible physical cables with invisible infrared optical signals for communication between processing apparatuses. This eliminates the aesthetic damage caused by exposed cables while maintaining secure information transfer, as infrared radiation is imperceptible to the human eye and does not interfere with the visual appearance of the apparatuses.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution alleviates operator burden by automating information transfer, prevents information leakage, and allows for flexible reconfiguration of processing apparatus layouts without the need for cables, ensuring secure and efficient synchronization of apparatus information.

Implementation Method 1

a transmission section that transmits the apparatus information by infrared radiation

Methodology Applied

Scientific EffectInfrared radiation: Infrared Radiation

Implementation Method 2

a reception section that receives apparatus information transmitted from another processing apparatus by infrared radiation

Methodology Applied

Scientific EffectInfrared radiation reception: Infrared Radiation

Data Source

PatentUS10153836B2Processing apparatus

Publication Date: 2018.12.11 DISCO CORP

AI summary

A processing apparatus for processing a workpiece includes: a chuck table that holds the workpiece; a processing unit that processes the workpiece held by the chuck table; a controller that controls the chuck table and the processing unit; an input section that inputs a processing condition to the controller; a storage section that stores the processing condition inputted to the input section; and an infrared transmission/reception unit that transfers apparatus information between the processing apparatus and another processing apparatus by infrared radiation.