Infrared Sensor Support Structure Segmentation
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Solution Overview
Problem
Non-cooling infrared ray sensors face sensitivity issues due to thermal conductance problems in their supporting structures, which are prone to distortion and contact with the substrate, leading to reduced thermal insulation performance under stress conditions.
Innovation Solution
The design incorporates a supporting part with multiple insulating connection parts connecting supporting legs, which reduces distortion and maintains thermal insulation by preventing contact with the substrate, even under stress, through precise fabrication techniques.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the supporting leg is made finer to reduce thermal conductance, then sensitivity is improved, but the structure becomes more prone to distortion and contact with substrate
Solution Approach 1:
The supporting leg is divided into multiple segments (first supporting leg, second supporting leg, third supporting leg) connected by connection parts. This segmentation allows each segment to be thinner for reduced thermal conductance while the connection parts provide structural support to prevent distortion and substrate contact, resolving the contradiction between sensitivity and reliability.
2Manufacturing precision
If mask matching accuracy is restrained within 0.1 μm or less to prevent wiring part shift, then supporting leg distortion is reduced, but fabrication complexity and cost increase
Solution Approach 1:
The connection part is designed with an asymmetric structure where the insulating part width is greater than the wiring part width, and the insulating part extends beyond the wiring part in the width direction. This asymmetric design provides a larger tolerance margin that reduces sensitivity to mask matching errors, allowing relaxation of the strict 0.1 μm accuracy requirement while still preventing supporting leg distortion.
3Reliability
If the supporting structure is made more robust to resist stress, then structural stability is improved, but thermal insulation performance deteriorates
Solution Approach 1:
The supporting structure employs local quality differentiation where the supporting legs are made extremely thin (1 μm or less) to minimize thermal conductance, while the connection parts are made wider with insulating material to provide structural stability. This localized variation in dimensions and materials allows the structure to simultaneously achieve both thermal insulation and stress resistance without compromising either property.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the thermal insulation performance of the detection cell by minimizing thermal conductance and maintaining sensitivity, while simplifying the fabrication process and improving yield by reducing the need for precise mask matching accuracy.
Implementation Method 1
an insulating part covering a surrounding area of the second wiring part
Implementation Method 2
lower thermal conductance of a supporting structure for physically and electrically connecting the detection cells to a substrate
Implementation Method 3
absorbs a focused infrared ray by an infrared ray detector to convert radiation energy of the infrared ray into electric signals
Implementation Method 4
detection cells made of an infrared ray-absorption material and a thermoelectric conversion device
Data Source
AI summary
An infrared ray detection device has a detection cell which has a thermoelectric converting part and an infrared ray absorption layer formed via a space on a semiconductor substrate, a first wiring part formed on the semiconductor substrate, and a supporting part, the detection cell being formed via the space on the semiconductor substrate and supports the detection cell. The supporting part includes a plurality of supporting legs which have a second wiring part electrically connecting the first wiring part to the detection cell and an insulating part covering a surrounding are of the second wiring part, and at least one connection part made of an insulating material connecting the plurality of supporting legs to each other.