Infrared Thermopile Sensor With Cavity Structure For Precision
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing infrared thermopile temperature sensors face challenges in achieving high precision and wide measurement range while maintaining a simple structure and low production complexity, particularly in cost-effective and technically straightforward methods.
Innovation Solution
The sensor design includes a substrate with infrared temperature measurement units comprising a thermocouple, infrared absorption portion, and cavity structures, along with optional visible-light sensing units, fabricated using a method that involves forming support and sacrifice portions on a substrate, followed by dry-etching to create a cavity structure, which enhances measurement accuracy and efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional infrared thermopile temperature sensors are designed to achieve high precision and wide measurement range, then measurement accuracy is improved, but device complexity and production difficulty increase
Solution Approach 1:
The sensor divides the temperature measurement function into multiple independent thermopile units, each with its own thermocouple and infrared absorption portion. These units are arranged in an array on the substrate, allowing parallel temperature measurements across different regions. Each unit operates independently, enabling high precision measurement without requiring a single complex sensing element.
Solution Approach 2:
The sensor integrates multiple functions into a single device: infrared temperature measurement through thermopile units, visible-light sensing through additional sensing units, and environmental monitoring. The substrate supports both infrared and visible-light sensing units, allowing the sensor to perform multiple measurement tasks simultaneously without requiring separate devices.
2Measurement precision
If traditional infrared thermopile temperature sensors are designed to achieve high precision and wide measurement range, then measurement accuracy is improved, but production complexity and cost increase
Solution Approach 1:
The patent employs a sacrifice layer (sacrifice film) during the fabrication process that is removed later to create cavities. This preliminary structure simplifies the manufacturing process by providing a template for cavity formation, avoiding the need for complex direct cavity etching. The sacrifice layer is deposited, patterned, and then selectively removed to define the cavity regions, making the production process more controllable and repeatable.
Solution Approach 2:
The patent replaces complex mechanical assembly processes with integrated thin-film fabrication techniques. Instead of assembling separate components mechanically, all sensor elements (thermopile units, infrared absorption portions, cavities, and visible-light sensing units) are created in-situ on the substrate using sequential thin-film deposition, patterning, and etching processes, significantly simplifying manufacturing.
3Measurement precision
If cavity structures are added to enhance measurement accuracy, then temperature measurement precision is improved, but device complexity increases
Solution Approach 1:
The cavity structures are formed using a preliminary sacrifice layer that defines their shape and position. This sacrifice layer is deposited before other sensor components and is selectively removed to create the cavities, providing a straightforward pathway to incorporate complex three-dimensional features without significantly complicating the overall fabrication process.
Solution Approach 2:
The cavity structures replicate the pattern of the sacrifice layer, creating consistent and repeatable geometric features across all sensor units. This copying approach ensures uniformity in cavity dimensions and positioning, maintaining measurement precision while simplifying the fabrication process through pattern replication.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables precise temperature measurement across a wide range with reduced production complexity and cost, integrating infrared and visible-light sensing capabilities for enhanced applicability.
Implementation Method 1
the thermocouple includes a first electrode and a second electrode... detecting an electromotive potential output by a thermocouple in the sensor
Implementation Method 2
the infrared absorption portion is disposed on the first support portion and covers the first end of the first electrode and the first end of the second electrode
Data Source
AI summary
A sensor includes: a substrate and at least one infrared temperature measurement unit disposed on the substrate. An infrared temperature measurement sub-unit includes: a first support portion, at least one second support portion, a thermocouple, and an infrared absorption portion. The thermocouple includes a first electrode and a second electrode, each of which includes a first end and a second end; the first ends of the first electrode and the second electrode are connected and disposed on the first support portion; the infrared absorption portion is disposed on the first support portion and covers the first ends of the first electrode and the second electrode; the second ends of the first electrode and the second electrode are not connected and disposed on the second support portion; and in the infrared temperature measurement unit, a cavity structure is included between at least the adjacent first and second support portions.