InGaN Epitaxial Reference Electrode for Stable Solid-State Sensing

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Solution Overview

Problem

Existing electrochemical sensors lack stable, all-solid-state reference electrodes, leading to issues such as bulkiness, difficulty in miniaturization, limited lifetime, and cumbersome maintenance of liquid-filled Ag/AgCl electrodes, and insufficient stability of solid-state alternatives.

Innovation Solution

A reference electrode using an InGaN-based semiconductor heterostructure with an InGaN layer (20-60% In content) and an InN layer (0.5-1.5 monolayers) to provide a stable, solid-state structure that maintains a constant electric potential independent of solution concentration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional reference electrodes are used, then electrochemical measurements can be performed, but the electrodes are fragile, have limited lifetime, and require frequent replacement

Engineering Contradiction:
Improveelectrode lifetimeVSAvoidelectrode structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent creates a solid-state copy of the reference electrode function using an epitaxial semiconductor wafer. Instead of using a conventional liquid-filled reference electrode with fragile components, the invention replicates the reference electrode's electrochemical function through a solid semiconductor structure with controlled doping regions that provide stable reference potential without mechanical fragility.

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The patent changes the physical and chemical parameters of the reference electrode by transitioning from liquid/electrolyte-based conventional electrodes to a solid-state epitaxial semiconductor structure. The controlled doping concentrations and thermal diffusion processes create specific electrical properties that provide stable reference potential with enhanced durability and extended lifetime.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If conventional electrochemical sensors are used, then chemical analysis can be performed, but the sensors lack integration with microelectronic processing and require separate handling

Engineering Contradiction:
Improveintegration capabilityVSAvoidmanufacturing process complexity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent merges the electrochemical sensor function with microelectronic processing by fabricating the reference electrode and sensor elements on a common epitaxial semiconductor wafer. This integration allows both electrochemical sensing and electronic signal processing to coexist on the same substrate, enabling combined chemical and electrical analysis capabilities within a single device platform.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The epitaxial semiconductor wafer serves multiple functions simultaneously: it provides the reference electrode structure, contains the working electrode for electrochemical sensing, and integrates with microelectronic circuitry for signal processing. This multi-functional platform eliminates the need for separate handling of electrochemical and electronic components.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If traditional reference electrode structures are used, then reference potential can be established, but the electrodes require frequent maintenance and replacement

Engineering Contradiction:
Improveelectrode stabilityVSAvoidmaintenance requirement
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The patent replaces expensive, fragile conventional reference electrodes with a durable solid-state epitaxial semiconductor structure that eliminates the need for frequent replacement. The solid-state construction with controlled doping profiles provides long-term stability without the maintenance issues associated with liquid electrolyte-based electrodes, effectively creating a permanent rather than disposable solution.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The InGaN-based reference electrode achieves a stable electrochemical response with minimal drift (less than 5 mV/decade concentration change and 1 mV/hour drift) and eliminates the need for liquid-filled electrodes, enhancing sensor stability and compactness.

Implementation Method 1

the n-type diffused region can be used as a reference electrode

Methodology Applied
Scientific EffectElectrochemical reactions: Redox Reactions

Implementation Method 2

the p-type diffused region can serve as an electrochemical sensor

Methodology Applied
Scientific EffectElectrochemical sensing: Redox Reactions

Data Source

PatentEP3966561B1Use of an epitaxial wafer as a reference electrode and electrochemical sensor comprising a reference electrode made of an epitaxial wafer
Publication Date: 2026.01.07 SOUTH CHINA NORMAL UNIV
  • EP3966561B1 patent drawingFigure 1
  • EP3966561B1 patent drawingFigure 2a~2c
  • EP3966561B1 patent drawingFigure 3

AI summary

Disclosed are an epitaxial wafer and a method of fabricating the same, and an electrochemical sensor, wherein the reference electrode comprises: a substrate (11); an InGaN layer (12) formed on a surface of the substrate (11) and having an In content between 20% and 60% so as to ensure that a transition from negatively charged surface states to positively charged surface states occurs within a composition range; and an InN layer (13) formed on a surface of the InGaN layer (12) facing away from the substrate (11) to act as a stabilization layer. The InGaN layer (12) with an In content between 20% and 60% allows generation of an electrochemical response independent of the concentration of a solution to be detected; and in addition, the InN layer (13) with a high density of intrinsic, positively charged surface states further improves the electrochemical stability of the reference electrode, and the combination of the InGaN layer (12) and the InN layer (13) further enables the reference electrode which is made of the epitaxial wafer to have a stable electrochemical response.