Ingot Grower Filter Housing Oxidation Combustion
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Solution Overview
Problem
The combustion process of red phosphorus deposits during the manufacturing of semiconductor and solar cell wafers poses risks of dust explosions and equipment failure due to the formation of volatile oxides and clay materials, which can lead to pump failure when these deposits react with oxygen and moisture.
Innovation Solution
An apparatus and method involving a chamber, exhaust pipe, and filter housing where the filter housing is blocked and formed in a vacuum state, followed by the injection of air to combust deposits, ensuring complete removal and preventing pump failure by maintaining a controlled oxidation process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If combustion is performed through oxidation reaction by exposing deposits to external air, then deposits are removed, but dust explosion occurs during combustion and friction explosion risk remains
Solution Approach 1:
The patent applies inert atmosphere principle by maintaining vacuum conditions in the chamber during combustion. The combustion process is performed by injecting air into the exhaust pipe where deposits are located, while the chamber remains under vacuum. This spatial separation ensures that combustible deposits do not come into contact with air in the chamber, eliminating dust explosion risk while still enabling effective combustion in the exhaust pipe region.
Solution Approach 2:
The patent segments the combustion process from the chamber environment by performing combustion specifically in the exhaust pipe region. The exhaust pipe is isolated from the chamber through valve control, allowing air to be injected into the exhaust pipe for combustion while the chamber maintains vacuum conditions. This segmentation prevents harmful effects from spreading to the main chamber.
2Reliability
If combustion is performed through oxidation reaction, then deposits are removed, but clay material flows into main pump causing pump failure
Solution Approach 1:
The patent extracts the combustion process from the main chamber system and relocates it to the exhaust pipe region. By blocking the connection between the chamber and exhaust pipe during combustion, and injecting air specifically into the exhaust pipe, the combustion-generated clay material is contained and removed through the exhaust path, preventing it from flowing into the main pump that serves the chamber vacuum system.
Solution Approach 2:
The exhaust pipe serves as an intermediary channel that separates the combustion process from the chamber vacuum system. Air is injected into the exhaust pipe as a mediator to enable combustion, while the blocked connection prevents combustion byproducts from contaminating the chamber and main pump. The exhaust pipe acts as a buffer zone that handles the combustion process independently.
3Productivity
If air is injected to combust deposits in the chamber, then combustion is effective, but dust explosion occurs in the chamber
Solution Approach 1:
The patent maintains the chamber in a vacuum (inert) state during combustion, eliminating oxygen that would support dust explosion. Air is injected specifically into the exhaust pipe where deposits are located, not into the chamber. This allows effective combustion to occur in the exhaust pipe while the chamber remains protected from explosion hazards through its vacuum environment.
Solution Approach 2:
The patent segments the air injection and combustion process to occur only in the exhaust pipe region, separate from the chamber. Valves are used to block the connection between chamber and exhaust pipe during combustion, creating two independent zones: one for safe vacuum-maintained combustion in the exhaust pipe, and another for protected chamber operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively removes deposits from the filter housing, preventing main pump failure and reducing the risk of explosions by ensuring thorough combustion and maintaining a safe, controlled environment.
Implementation Method 1
combustion is performed through the oxidation reaction of air and deposits
Implementation Method 2
the high-temperature deposits are exposed to the atmosphere, that is, external air, and combustion is performed through the oxidation reaction of air and deposits
Implementation Method 3
forming the filter housing in a vacuum state
Implementation Method 4
P4+3O2→P4O6
Implementation Method 5
combustion occurs as shown in Chemical Formula 1 to produce oxides
Implementation Method 6
When the oxides generated by Chemical Formula 1 are exposed to moisture, a clay material is produced as shown in Chemical Formula 2
Data Source
AI summary
A method of oxidation-combusting an ingot grower comprises a) blocking between the filter housing and the exhaust pipe, b) forming the filter housing in a vacuum state, and c) injecting air into the filter housing through an injection pipe connected to a first side of the filter housing to combust the filter housing.