Ingot Puller Heat Shield for Thermal Efficiency

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Solution Overview

Problem

Conventional ingot puller apparatuses face inefficiencies in achieving a desired temperature profile due to the removal of insulation at the bottom of the hotzone, leading to decreased thermal efficiency and energy wastage, especially with longer side heaters that heat the crucible and shaft during crystal growth.

Innovation Solution

The ingot puller apparatus incorporates a shorter side heater and a heat shield disposed below the side heater, which directs heat efficiently to the crucible and susceptor, reducing energy loss and allowing for a wider temperature range without increasing energy input, while the heat shield minimizes cooling of the side heater and maintains the temperature profile with less energy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If insulation is removed toward the bottom of the hotzone to achieve a desired temperature profile, then the temperature distribution is improved, but the side heater energy input increases and thermal efficiency decreases

Engineering Contradiction:
Improvetemperature profileVSAvoidthermal efficiency
Core Design Contradiction:
TemperatureVSLoss of energy

Solution Approach 1:

A heat shield is introduced as an intermediary component between the side heater and the crucible/shaft. The heat shield redirects thermal energy that would otherwise be lost to the shaft and crucible bottom back onto the melt, achieving the desired temperature profile while maintaining thermal efficiency by reducing overall energy consumption.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Temperature

If a relatively long side heater is used to maintain temperature, then the heating coverage is improved, but the crucible and shaft are heated during crystal growth decreasing energy efficiency

Engineering Contradiction:
Improveheating coverageVSAvoidenergy efficiency
Core Design Contradiction:
TemperatureVSLoss of energy

Solution Approach 1:

The heating system is modified to provide localized heating where needed. The side heater is positioned and configured to heat specific zones of the melt, while the heat shield ensures that thermal energy is directed locally at the melt rather than being dispersed to heat the entire crucible and shaft structure.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The heat shield acts as a mediator that redirects thermal energy from the side heater back onto the melt, preventing energy waste on the shaft and crucible while maintaining adequate heating coverage throughout the crystal growth process.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Productivity

If the crucible is raised during crystal growth, then the ingot can be pulled from the melt, but the side heater heats the bottom of the crucible and the shaft decreasing thermal efficiency

Engineering Contradiction:
Improveingot pulling capabilityVSAvoidthermal efficiency
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The heat shield serves as a mediator that intercepts thermal radiation from the side heater and redirects it onto the melt. This prevents the shaft and crucible bottom from being heated during the crucible raising operation, maintaining thermal efficiency while enabling continuous ingot pulling.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances energy efficiency by reducing interstitial oxygen levels and maintaining a consistent temperature profile with reduced energy consumption, improving the overall efficiency of the ingot growth process.

Implementation Method 1

A heat shield is disposed directly below the side heater... the heat shield minimizes cooling of the side heater and maintains the temperature profile with less energy

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 2

the heat shield minimizes cooling of the side heater and maintains the temperature profile with less energy

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentUS20220145492A1Ingot puller apparatus having a heat shield disposed below a side heater and methods for preparing an ingot with such apparatus
Publication Date: 2022.05.12 GLOBALWAFERS CO LTD
  • US20220145492A1 patent drawing
  • US20220145492A1 patent drawing
  • US20220145492A1 patent drawing

AI summary

Ingot puller apparatus having a heat shield disposed below a side heater and methods for preparing an ingot in such ingot puller apparatus are disclosed. In some embodiments, the side heater is relatively short. The side heater may be fully above a floor of the crucible when the crucible is in its lowest position in the ingot puller.