Ingot Puller Heat Shield Layout for Efficient Crystal Growth

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Solution Overview

Problem

Conventional ingot puller apparatuses face inefficiencies in achieving a desirable temperature profile while maintaining thermal efficiency due to the use of relatively long side heaters that increase energy input and heat the crucible and shaft, reducing overall energy efficiency.

Innovation Solution

Ingot puller apparatus with a shorter side heater and a heat shield disposed below it, which directs heat more efficiently to the crucible and susceptor, reducing energy loss and allowing for improved insulation to maintain temperature profiles with less energy input.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a relatively long side heater is used in the ingot puller hotzone, then a desirable temperature profile can be achieved, but thermal efficiency decreases due to increased energy input and heating of the crucible and shaft

Engineering Contradiction:
Improvetemperature profileVSAvoidthermal efficiency
Core Design Contradiction:
TemperatureVSLoss of energy

Solution Approach 1:

A heat shield is introduced as an intermediary component between the side heater and the crucible/shaft. The heat shield redirects and concentrates thermal energy toward the melt zone while preventing excessive heating of the crucible and shaft, thereby resolving the contradiction between achieving desired temperature profile and maintaining thermal efficiency

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The heat shield creates localized thermal zones by directing heat preferentially to where it is needed (the melt zone) while insulating areas where heat should be minimized (crucible and shaft). This spatial differentiation of thermal quality allows the system to maintain efficient energy use while achieving the required temperature distribution

Inventive Principle:
Principle #3Local quality

2Temperature

If insulation is removed toward the bottom of the hotzone to achieve desired temperature profile, then temperature distribution improves, but side heater energy input increases

Engineering Contradiction:
Improvetemperature profileVSAvoidside heater energy input
Core Design Contradiction:
TemperatureVSUse of energy by moving object

Solution Approach 1:

The heat shield serves as a thermal mediator that replaces the need for removing insulation. By strategically positioning the heat shield, the system achieves the desired temperature profile through controlled heat redirection rather than through increased energy input, thus resolving the energy efficiency issue

Inventive Principle:
Principle #24Intermediary (Mediator)

3Temperature

If a relatively long heater is used, then heating coverage is increased, but energy efficiency decreases due to heating of the crucible and shaft during crystal growth

Engineering Contradiction:
Improveheating coverageVSAvoidenergy efficiency
Core Design Contradiction:
TemperatureVSLoss of energy

Solution Approach 1:

The heat shield acts as a thermal intermediary that extends the effective heating coverage to the melt zone while simultaneously blocking excessive heat transfer to the crucible and shaft. This resolves the contradiction by decoupling heating coverage from unnecessary energy consumption in non-target areas

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The heat shield creates localized thermal zones by directing heat preferentially to the melt zone while insulating the crucible and shaft. This spatial control of thermal quality allows comprehensive heating coverage where needed while minimizing energy waste elsewhere

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances energy efficiency by reducing energy consumption and minimizing oxygen uptake in the ingot, while maintaining a consistent temperature profile during crystal growth.

Implementation Method 1

heat shield disposed below a side heater

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 2

heat shield directs heat more efficiently to the crucible and susceptor

Methodology Applied
Scientific EffectHeat reflection: Reflection

Implementation Method 3

allowing for improved insulation to maintain temperature profiles with less energy input

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentEP4244412B1Ingot puller apparatus having a heat shield disposed below a side heater and methods for preparing an ingot with such apparatus
Publication Date: 2026.02.25 GLOBALWAFERS CO LTD
  • EP4244412B1 patent drawingFigure 1
  • EP4244412B1 patent drawingFigure 2
  • EP4244412B1 patent drawingFigure 3

AI summary

Ingot puller apparatus having a heat shield disposed below a side heater and methods for preparing an ingot in such ingot puller apparatus are disclosed. In some embodiments, the side heater is relatively short. The side heater may be fully above a floor of the crucible when the crucible is in its lowest position in the ingot puller.