Injector Liquid Membrane for Semiconductor Abatement
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Solution Overview
Problem
Semiconductor manufacturing abatement systems face challenges with rapid reaction of waste gases like trichlorosilane with moisture, leading to clogging and equipment damage due to solid deposits.
Innovation Solution
The implementation of an injector system within the abatement system, featuring an inlet tube with inert gas injection to create a compression zone and a containment tube with liquid nozzles to form a liquid membrane, which traps reactive waste gases and prevents solid deposits on injector surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If waste gases are processed through conventional abatement systems, then waste gas removal is achieved, but solid deposits form on inlet components causing clogging and equipment damage
Solution Approach 1:
A liquid membrane is introduced as an intermediary substance between the waste gas stream and the inlet components. The liquid membrane captures reactive waste gases through absorption or reaction, preventing them from contacting and depositing on solid surfaces. The liquid phase serves as a mediator that transforms the harmful gas-phase reactions into a liquid-phase process that protects the equipment.
Solution Approach 2:
An inert gas is injected to create an inert atmosphere within the inlet tube, surrounding the waste gas stream and preventing direct contact between reactive waste gases and the inlet tube walls. This inert environment suppresses unwanted reactions and deposit formation on surfaces.
2Object-affected harmful factors
If inert gas is injected to create compression zone, then reactive waste gas deposition is reduced, but device complexity increases
Solution Approach 1:
The inlet tube structure is designed to perform multiple functions: it serves as the waste gas passage, the injection point for inert gas, and the containment structure for the liquid membrane. By making the inlet tube multi-functional, the patent reduces the need for separate components, thereby managing device complexity while achieving the desired protective effects.
Solution Approach 2:
The liquid membrane is positioned within the inlet tube, nested inside the existing structure. The inert gas injection system is also integrated within the inlet tube architecture. This nested arrangement allows multiple protective mechanisms to coexist within a single structural framework, minimizing overall system complexity.
3Object-affected harmful factors
If liquid membrane is formed to trap reactive waste gases, then solid deposits are prevented, but manufacturing complexity increases
Solution Approach 1:
The liquid membrane is created and maintained using hydraulic principles, where liquid is supplied through nozzles or channels within the inlet tube. The liquid flow rates and pressures are controlled to maintain a stable membrane configuration. This approach uses well-established fluid handling techniques, making the system manufacturable with standard fluid control components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively prevents solid deposits on injector surfaces, reduces the need for frequent cleaning, and enhances tool longevity and operational reliability by controlling the reaction location of reactive waste gases.
Implementation Method 1
the liquid membrane allows diffusion of non-reactive waste gas of the waste gas stream through the membrane while trapping a reactive waste gas
Implementation Method 2
one or more first liquid nozzles configured to create a cylindrical liquid curtain in an interior volume of the containment tube to provide a liquid barrier for the waste gas stream downstream of the inlet tube
Implementation Method 3
one or more first gas nozzles configured to inject a first inert gas into the waste gas stream in a downward, radially inward, or downward and radially inward direction to create a compression zone for the waste gas stream
Data Source
AI summary
Embodiments of methods and apparatus for an injector for an abatement system are provided herein. In some embodiments, an injector includes an inlet tube having an inner wall and an outer wall and a gap disposed therebetween, wherein the inner wall defines a flow path therein for a waste gas stream from a waste gas inlet at a first end of the inlet tube to a waste gas outlet at a second end of the inlet tube, wherein the inlet tube includes an inert gas inlet that extends between the inner wall and the outer wall to one or more first gas nozzles and a containment tube coupled to the inlet tube and disposed about the second end of the inlet tube, wherein the containment tube includes a liquid inlet port that is fluidly coupled to one or more first liquid nozzles and one or more second liquid nozzles.