Semiconductor Tool Injector with Micrometer Zero-Stop Flow Control
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Solution Overview
Problem
Current injectors for semiconductor fabrication tools lack easy and accurate calibration, do not have a reliable zero stop for complete flow closure, and are difficult to refurbish due to their unibody design, leading to inefficiencies and increased replacement costs.
Innovation Solution
The injector features a micrometer with a distal end that can be precisely raised or lowered to control the flow rate, a spring element for continuous biasing, and a modular design allowing easy disassembly and cleaning, including a zero stop mechanism that ensures complete closure without affecting calibration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a unibody injector design is used, then the injector structure is simple and robust, but it is difficult to disassemble for cleaning and refurbishment
Solution Approach 1:
The injector is divided into multiple separable components including a body, cap, needle assembly, and seal jet assembly that can be disassembled from each other. This segmentation allows each component to be independently cleaned, inspected, and refurbished while maintaining the overall structural integrity and simplicity of the original unibody design during operation.
2Measurement precision
If a micrometer mechanism is added for precise flow control, then flow rate precision is improved, but device complexity increases
Solution Approach 1:
A micrometer mechanism is introduced as an intermediary component between the operator and the needle assembly. The micrometer provides precise rotational control that translates to accurate linear displacement of the needle, enabling fine flow rate adjustment without requiring complex electronic control systems or multiple adjustment mechanisms.
3Reliability
If a zero stop mechanism is implemented for complete flow closure, then flow closure reliability is improved, but the risk of affecting micrometer calibration increases
Solution Approach 1:
The zero stop function is extracted as a separate mechanical feature from the micrometer calibration system. The zero stop mechanism uses a distinct physical reference point or mechanical latch that independently ensures complete needle closure without requiring adjustment of the micrometer's calibrated scale, thereby maintaining both closure reliability and calibration accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables precise and repeatable calibration, extends the injector's lifespan by allowing thorough cleaning, and reduces replacement costs by providing a reliable zero stop and easy maintenance.
Implementation Method 1
a spring element positioned against the needle injector to continually bias the needle against the micrometer
Data Source
AI summary
The present invention generally relates to an injector for a semiconductor fabrication tool for dispensing a material into an interior volume of the fabrication tool during a fabrication process of a semiconductor wafer. The injector may have a micrometer that may be adjusted so as to totally stop the flow of material through the injector or the micrometer may be adjusted to allow a range of precisely controlled flow rates of material through the injection. The injector is also preferably able to be easily taken apart and cleaned in the field, thereby increasing the injectors useful lifetime.