Ink Jet Head Segmentation for Uniform Thin Film Deposition

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Solution Overview

Problem

Conventional ink jet heads used in display device manufacturing cause interfacial turbulence due to excessive chemical liquid supply at boundaries between adjacent regions, leading to non-uniform thin film formation.

Innovation Solution

The method employs an ink jet head with a central portion and multiple peripheral portions, each with distinct chemical liquid supply phases, allowing for controlled and varied chemical liquid distribution across the substrate to prevent excessive liquid accumulation at boundaries, ensuring uniform thin film formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional ink jet head supplies chemical liquid in two portions (first portion 50%, second portion 50%) onto predetermined region, then chemical liquid can be supplied onto substrate, but excessive chemical liquid is supplied on boundary between adjacent regions causing interfacial turbulence

Engineering Contradiction:

Improvechemical liquid supplyVSAvoiduniform thin film formation

Core Design Contradiction:

Quantity of substanceVSEase of operation

Solution Approach 1:

The ink jet head is divided into multiple independent nozzle groups (first nozzle group, second nozzle group, third nozzle group) that can operate independently. Each nozzle group corresponds to a specific region (first region, second region, third region) and supplies chemical liquid separately, allowing precise control of liquid distribution across different areas of the substrate.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different nozzle groups supply different amounts of chemical liquid to different regions based on local requirements. The first nozzle group supplies chemical liquid to the first region, the second nozzle group to the second region, and the third nozzle group to the third region, ensuring each region receives appropriate liquid quantity without excessive accumulation at boundaries.

Inventive Principle:

Principle #3Local quality

2Quantity of substance

If ink jet head moves over substrate by length of first portion then second portion supplies chemical liquid again, then predetermined region receives chemical liquid, but boundary regions receive excessive liquid causing Marangoni Effect

Engineering Contradiction:

Improvechemical liquid supplyVSAvoidthin film uniformity

Core Design Contradiction:

Quantity of substanceVSManufacturing precision

Solution Approach 1:

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Instead of moving the ink jet head in traditional two-portions sequence that causes boundary overflow, the patent uses multiple nozzle groups that simultaneously or sequentially supply liquid to different regions without requiring head movement between portions, thereby inverting the conventional approach and eliminating boundary accumulation.

Inventive Principle:

Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively prevents interfacial turbulence by supplying chemical liquid more than twice onto specific regions, ensuring a uniformly formed thin film with desired thickness on the substrate.

Implementation Method 1

a first chemical liquid supply of the chemical liquid may be provided from the central portion onto a substrate, a second chemical liquid supply of the chemical liquid may be provided from the first portion onto a substrate, and a third chemical liquid supply of the chemical liquid may be provided from the second portion onto a substrate

Methodology Applied

Scientific EffectInk jet deposition:

Implementation Method 2

when excessive chemical liquid is provided on the boundary between adjacent regions, the interfacial turbulence (also, referred to as Marangoni Effect) is caused by the chemical liquid

Methodology Applied

Scientific EffectInterfacial turbulence (Marangoni Effect): Marangoni Effect

Data Source

PatentUS11046078B2Method of discharging chemical liquid using an ink jet head

Publication Date: 2021.06.29 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

In a method of supplying chemical liquid using an ink jet head including a central portion and peripheral portions each having a first portion and a second portion, a first chemical liquid supply of a chemical liquid may be provided from the central portion onto a substrate, a second chemical liquid supply of the chemical liquid may be provided from the first portion onto a substrate, and a third chemical liquid supply of the chemical liquid may be provided from the second portion onto a substrate. The ink jet head may be moved over the substrate by a length of the peripheral portion. The first chemical liquid supply of the chemical liquid may be provided from the central portion onto a substrate, the second chemical liquid supply of the chemical liquid may be provided from the first portion onto a substrate, and the third chemical liquid supply of the chemical liquid may be provided from the second portion onto a substrate.