Ink Jet Protective Layer for Charged Particle Beam Processing

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Solution Overview

Problem

Current methods for applying protective layers during charged-particle-beam processing are slow, inaccurate, and can damage work piece surfaces, especially when using charged-particle-beam-assisted deposition, which consumes significant processing time and compromises measurement accuracy.

Innovation Solution

A method using an ink jet-type dispenser to apply a localized protective layer by directing a drop of fluid onto the work piece surface, which dries to form a protective layer without direct contact, allowing for high throughput and precise placement with minimal surface alteration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If charged-particle-beam-assisted deposition is used to apply protective layer, then protective layer can be deposited locally with precise placement, but processing time increases significantly and surface damage occurs

Engineering Contradiction:

Improveplacement accuracyVSAvoidprocessing time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent introduces a liquid dispensing system as an intermediary method to apply protective layer materials. Instead of using charged particle beams for deposition, the system uses a liquid dispenser to deposit precursor materials that are then converted to protective layers through thermal or chemical processes, thereby avoiding beam-induced surface damage and reducing processing time

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the charged particle beam mechanism with a liquid dispensing and thermal processing system. The liquid dispenser mechanically deposits material precursors, and subsequent thermal treatment converts these precursors to the desired protective layer, substituting the complex charged particle beam deposition process with simpler, faster mechanical and thermal processes

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If charged particle beam is used to deposit protective layer, then localized protection is achieved, but work piece surface is altered or damaged

Engineering Contradiction:

Improvelocalization accuracyVSAvoidsurface damage

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The liquid dispensing system serves as an intermediary that deposits protective layer precursors without directly exposing the work piece surface to high-energy charged particles. The liquid precursor materials are deposited gently and then converted to protective layers through controlled thermal or chemical processes, eliminating beam-induced surface damage while maintaining precise localization

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent applies protective layer precursor materials to the work piece surface before charged particle beam processing. By pre-depositing these precursors using a non-damaging liquid dispensing method, the protective layer is already in place to shield the surface during subsequent beam processing, preventing surface alteration and damage

Inventive Principle:

Principle #10Preliminary action

3Reliability

If conventional deposition methods are used to apply protective layer, then surface protection is provided, but processing throughput is reduced

Engineering Contradiction:

Improvesurface protectionVSAvoidprocessing throughput

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The patent replaces conventional slow charged particle beam deposition with a rapid liquid dispensing system. The liquid dispenser can quickly deposit precursor materials across the work piece surface, and subsequent thermal or chemical conversion processes rapidly form the protective layer, significantly increasing processing throughput while maintaining reliable surface protection

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical and chemical parameters of the deposition process by using liquid precursor materials instead of charged particle beams. This parameter change enables faster deposition rates and shorter processing times while maintaining the protective function, thereby improving productivity without sacrificing surface protection reliability

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables rapid, accurate, and damage-free deposition of a protective layer with high placement accuracy, reducing material alteration and maintaining structural integrity during charged-particle-beam processing.

Implementation Method 1

liquid is directed to a region of interest on a work piece surface. The liquid dries on the surface to provide a protective layer.

Methodology Applied

Scientific EffectEvaporation: Evaporation

Data Source

PatentUS9263306B2Protective layer for charged particle beam processing

Publication Date: 2016.02.16 FEI CO

AI summary

A protective layer is applied to a work piece to protect the surface during charged particle beam processing by directing a fluid toward the surface. The surface is preferably not touched by the applicator. Ink jet print-type print heads are suitable applicators. Ink jet-type print heads allow a wide variety of fluids to be used to form the protective layer. Useful fluids that form protective layers include colloidal silica having small silver particles and hydrocarbon-based inks.