Inkjet Nozzle Map Reconstruction for Abnormal Nozzle Compensation
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Solution Overview
Problem
In the manufacturing of semiconductor and display devices, the increase in the number of scans due to non-jetting nozzles in inkjet equipment leads to an increase in tact time, which is inefficient and affects the overall printing process.
Innovation Solution
A substrate treatment apparatus and method that reconstructs a compensation nozzle map by processing specific nozzles as unused nozzles, allowing for adjustment of nozzle positions without increasing the number of scans, thereby compensating for abnormal nozzles and maintaining efficient printing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the number of scans is increased to compensate for non-jetting nozzles, then printing reliability is improved, but tact time increases
Solution Approach 1:
The patent changes the parameter of nozzle usage by selectively marking certain nozzles as unused and adjusting the nozzle map accordingly. This allows the system to compensate for non-jetting nozzles by redistributing their output to other nozzles within the same scan, eliminating the need to increase the number of scans and thus maintaining tact time while ensuring printing reliability.
Solution Approach 2:
The patent dynamically adjusts the nozzle map in real-time based on detected non-jetting nozzles. The controller identifies which nozzles are not jetting properly and dynamically reconstructs the nozzle map by assigning unused nozzle flags to appropriate nozzles, allowing flexible compensation without requiring additional scans.
2Manufacturing precision
If the number of scans is increased to compensate for non-jetting nozzles, then printing quality is improved, but productivity decreases
Solution Approach 1:
The patent modifies the nozzle configuration parameter by identifying non-jetting nozzles and redistributing their assigned patterns to functional nozzles within the same scan cycle. This parameter change enables high-quality printing without requiring additional scans, thereby maintaining both printing quality and productivity.
Solution Approach 2:
The patent performs preliminary detection of non-jetting nozzles before the printing process begins. By identifying and compensating for defective nozzles in advance through nozzle map reconstruction, the system ensures high printing quality from the first scan without needing to repeat scans, thus maintaining productivity.
3Reliability
If normal nozzles are processed as unused nozzles to compensate for abnormal nozzles, then compensation effectiveness is improved, but device complexity increases
Solution Approach 1:
The patent segments the nozzle array into functional groups by marking specific nozzles as unused based on their position and jetting status. The controller divides the nozzle map into segments where abnormal nozzles are replaced by designated unused nozzles, creating a simplified control strategy that maintains compensation effectiveness while reducing the complexity of handling individual nozzle failures.
Data Source
AI summary
Provided are a substrate treatment apparatus and method which reconstruct a compensation nozzle map by processing nozzles in a specific area among all nozzles as unused nozzles. The substrate treatment apparatus includes: a process processing unit supporting a substrate while the substrate is being treated; an inkjet head unit including a plurality of nozzles and jetting a substrate treatment liquid onto the substrate to treat the substrate; a gantry unit moving the inkjet head unit on the substrate; and a controller controlling the nozzles, wherein the controller compensates for an abnormal nozzle by not using normal nozzles.