Inkjet-Printed Shrinkable Films for Localized Substrate Planarization

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional methods for correcting bowing and warping in optical devices and substrates are expensive and lack the ability for localized corrections, which are necessary for optimal optical performance.

Innovation Solution

A method using inkjet printing to apply films that polymerize and contract, allowing for precise control of substrate deformation by printing materials with different shrinkage properties in specific areas to induce a bend and correct substrate curvature.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional planarization or polishing methods are used to correct bowing, then substrate deformation can be corrected, but the process becomes expensive and complex

Engineering Contradiction:
Improvesubstrate planarityVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies parameter changes by utilizing materials with different shrinkage characteristics (first and second shrinkage values) to correct substrate deformation. By selecting materials with specific shrinkage properties and controlling their deposition thickness, the method achieves substrate planarization through controlled contraction during curing, avoiding complex mechanical polishing processes

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements local quality by applying different materials or different thicknesses of the same material to different regions of the substrate based on their specific deformation characteristics. This allows localized correction of bowing and warping in specific areas rather than treating the entire substrate uniformly, reducing overall process complexity

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If conventional CVD or PVD deposition is used to correct bowing, then substrate deformation can be corrected, but the method becomes expensive and does not allow localized corrections

Engineering Contradiction:
Improvesubstrate planarityVSAvoidcost and localization capability
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent utilizes parameter changes by employing materials with specifically controlled shrinkage values (first shrinkage value for convex areas, second shrinkage value for concave areas) to achieve deformation correction. This material parameter selection enables cost-effective deposition through inkjet printing rather than expensive CVD/PVD processes

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies local quality by selectively depositing materials with different shrinkage properties in specific regions of the substrate. Convex areas receive materials with first shrinkage values while concave areas receive materials with second shrinkage values, enabling localized correction without requiring expensive conventional deposition methods across the entire substrate

Inventive Principle:
Principle #3Local quality

3Ease of manufacture

If uniform material deposition is applied across the substrate, then the process is simple, but it cannot provide localized corrections for optimal optical performance

Engineering Contradiction:
Improveprocess simplicityVSAvoidlocalized deformation correction
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent implements local quality by varying material properties or deposition thickness in different regions of the substrate. The system identifies convex and concave areas and applies different shrinkage characteristics to each region, enabling localized deformation correction while maintaining a relatively simple inkjet printing process compared to conventional methods

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables cost-effective, localized correction of substrate deformation, improving optical device performance by allowing for precise shaping and planarity without affecting areas that do not require correction.

Implementation Method 1

printing a first film on a first area of a surface of the substrate via inkjet printing, the first film being a material that polymerizes and contracts when cured

Methodology Applied
Scientific EffectPolymerization: Photopolymerisation

Implementation Method 2

the first film being a material that polymerizes and contracts when cured

Methodology Applied
Scientific EffectContraction: Thermal Contraction

Data Source

PatentUS20230192971A1Shape thin substrates by curing shrinkable materials deposited with localized variations
Publication Date: 2023.06.22 APPLIED MATERIALS INC
  • US20230192971A1 patent drawing
  • US20230192971A1 patent drawing
  • US20230192971A1 patent drawing

AI summary

Methods of curing a deformation in a substrate are provided. In some embodiments, the method includes identifying one or more areas on the substrate with deformation. The method further includes printing a first film on a first area of a surface of the substrate via inkjet printing, the first film being a material that polymerizes and contracts when cured. The method includes printing a second film on a second area of the surface of the substrate via inkjet printing, the second film being a material that polymerizes and contracts when cured. The method further includes curing the first film and the second film to induce a bend in the substrate. In some embodiments, the method includes inkjet printing a third film and a fourth film on the surface of the substrate.