Inkjet Jetting Timing Control Using Direct Encoder Feedback
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Solution Overview
Problem
Existing substrate processing apparatus control systems face errors in inkjet printing due to position errors between encoder signals and actual positions, influenced by control sampling cycles and following errors, leading to limitations in pattern generation and image resolution.
Innovation Solution
A substrate processing apparatus control system that includes a jetting driver capable of directly receiving an encoder signal from a stage unit, correcting position errors by linearly reflecting a position correction value to the encoder count value, and outputting a jetting signal to the inkjet head unit based on the corrected count value.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If position error correction is performed using a motion controller based on encoder signal with feed forward control, then the landing error can be corrected, but a following error still exists due to control sampling cycle delay
Solution Approach 1:
The patent implements direct feedback from the encoder signal to the jetting driver, where the encoder signal is counted to determine the actual stage position and this information is used to correct the jetting timing in real-time, eliminating the delay inherent in feed-forward motion controller-based correction systems
Solution Approach 2:
The patent replaces the motion controller-based mechanical correction system with a direct encoder-to-jetting-driver signal path that uses digital counting and timing adjustment, substituting the intermediate mechanical control layer with a more direct electronic signaling approach that eliminates sampling cycle delays
2Measurement precision
If pattern image resolution is increased to correct position error accurately, then the position correction precision is improved, but the pattern generation calculation time increases due to image size limitation
Solution Approach 1:
The patent extracts the position correction information directly from the encoder signal counting process, separating it from the pattern image generation process. By obtaining position data from the encoder rather than deriving it from high-resolution pattern images, the system achieves accurate position correction without the computational burden of processing large-resolution images
Solution Approach 2:
The patent uses the encoder signal as a direct copy of the actual stage position, replacing the need to generate and process high-resolution pattern images for position determination. This direct copying of position information from the encoder eliminates the time-consuming image processing step while maintaining position accuracy
Data Source
AI summary
Provided is a substrate processing apparatus control system and substrate processing apparatus control method, the substrate processing apparatus control system including an image generator for generating an image to be printed by a substrate processing apparatus including an inkjet head unit to print the image on a substrate in an inkjet printing manner, a jetting driver for receiving an image signal from the image generator and outputting a jetting signal to the inkjet head unit to allow the substrate processing apparatus to print the image on the substrate based on the image signal, and a motion controller for controlling operation of a stage unit for supporting and moving the substrate in the substrate processing apparatus.