Inlet Head Assembly for Semiconductor Abatement
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Solution Overview
Problem
Existing abatement apparatuses for semiconductor processing tools face inefficiencies in combustion reagent consumption and heat loss when attempting to achieve desired destructive rate efficiency (DRE) for effluent streams containing perfluorinated compounds, leading to higher reagent usage and potential hazardous chemical reactions.
Innovation Solution
An inlet head assembly with a pilot nozzle and angled inlet nozzles positioned around it, along with a further combustion reagent nozzle, is designed to improve the clustering and heating of effluent streams, reducing heat loss and reagent consumption by creating a stable coaxial diffusion flame, ensuring efficient abatement while maintaining chemical separation of incompatible streams.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If effluent streams are supplied using conventional inlet nozzles, then the abatement process can proceed, but combustion reagent consumption increases and heat loss occurs
Solution Approach 1:
Multiple inlet nozzles are merged into a single inlet head assembly that clusters effluent streams together around the pilot nozzle, allowing them to be heated by a common pilot flame and reducing overall heat loss to the environment
Solution Approach 2:
The inlet nozzles are angled at specific angles (5°-60°) relative to the axial orientation of the pilot nozzle, creating a three-dimensional clustered arrangement that optimizes heat transfer from the pilot flame to all effluent streams simultaneously
2Productivity
If more combustion reagents are supplied to achieve desired DRE, then destructive rate efficiency improves, but reagent consumption and cost increase
Solution Approach 1:
The clustered effluent streams heat each other through thermal radiation and convection within the confined inlet head assembly, reducing the external combustion reagent demand needed to achieve the desired destruction rate efficiency
3Device complexity
If incompatible effluent streams are mixed upstream, then processing is simplified, but hazardous chemical reactions may occur
Solution Approach 1:
Each inlet nozzle maintains separate delivery of effluent streams until they enter the abatement chamber, preventing premature mixing of incompatible chemicals while still achieving thermal efficiency through the clustered geometric arrangement
Solution Approach 2:
The inlet head assembly acts as an intermediary structure that provides thermal coupling between effluent streams without allowing chemical mixing, using the physical geometry of the nozzle arrangement to achieve heat transfer while maintaining chemical separation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the destruction rate efficiency of compounds within the effluent streams by reducing heat loss and reagent usage, while minimizing hazardous reactions and maintaining effective abatement performance.
Implementation Method 1
the pilot nozzle is configured to supply at least one pilot combustion reagent stream to a downstream abatement chamber
Implementation Method 2
the effluent streams are clustered and packed closer together around and directed towards the pilot nozzle which improves the heating of the effluent stream, improving the DRE and reducing heat loss
Implementation Method 3
creating a stable coaxial diffusion flame
Data Source
AI summary
An inlet head assembly for an abatement apparatus is disclosed. The inlet head assembly is for an abatement apparatus for abating an effluent stream from a semiconductor processing tool, the inlet head assembly comprises: an inlet head; a pilot nozzle extending within the inlet head and configured to supply at least one pilot combustion reagent stream to a downstream abatement chamber of the abatement apparatus; and a plurality inlet nozzles, each extending within the inlet head and configured to supply an associated effluent stream for abatement within the abatement chamber, the plurality of inlet nozzles being positioned around the pilot nozzle. In this way, the effluent streams are packed closer together around the pilot nozzle which improves the heating of the effluent stream, improving the DRE and reducing heat loss, which enables a reduction in the combustion reagents needing to be supplied.