Inlet Nozzle Segmentation for Low Flow Abatement

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Solution Overview

Problem

Existing abatement apparatuses face reduced performance at low flow rates due to incomplete diffusion of combustion by-products within the effluent gas stream, which affects the efficacy of PFC and compound removal from effluent gas streams in manufacturing processes.

Innovation Solution

The inlet assembly features a flow-dividing structure within the nozzle that separates the effluent gas stream into multiple streams, reducing the distance for diffusion and enhancing separation, thereby improving abatement performance by maintaining separate streams even at low flow rates. This is achieved through a centrally located flow-dividing structure that splits the nozzle bore into multiple downstream bores, optimizing flow characteristics and reducing re-mixing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a single effluent gas stream is used in the abatement apparatus, then the apparatus can handle higher flow rates, but the diffusion distance for combustion by-products becomes too long, reducing abatement efficacy particularly at lower flow rates

Engineering Contradiction:
Improveabatement efficacyVSAvoiddiffusion distance
Core Design Contradiction:
ReliabilityVSLength of moving object

Solution Approach 1:

The inlet nozzle is divided into multiple nozzle bores (e.g., three bores) that receive effluent gas streams separately. This segmentation creates multiple independent flow paths, reducing the diffusion distance for combustion by-products in each stream and improving abatement efficacy, particularly at lower flow rates where complete diffusion is critical

Inventive Principle:
Principle #1Segmentation

2Reliability

If multiple effluent gas streams are generated by dividing the nozzle bore, then the diffusion distance is reduced and abatement performance improves at low flow rates, but the device complexity increases

Engineering Contradiction:
Improveabatement performanceVSAvoidnozzle structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The nozzle is segmented into multiple bores within a single inlet assembly, creating separate flow paths that reduce diffusion distance and improve performance at low flow rates

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple nozzle bores are integrated into a single inlet assembly structure, combining the functionality of multiple nozzles while maintaining a compact, unified design that minimizes overall device complexity

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances the abatement performance of the apparatus by ensuring effective diffusion and reaction of combustion by-products with the effluent stream at low flow rates, improving the removal efficiency of PFCs and other compounds.

Implementation Method 1

the effluent treatment mechanism typically relies on a diffusion process within the radiant burner; the combustion bi-products need to diffuse into the effluent stream

Methodology Applied
Scientific EffectDiffusion: Diffusion

Implementation Method 2

the effluent gas stream is conveyed into a combustion chamber

Methodology Applied
Scientific EffectConvection: Convection

Implementation Method 3

Known radiant burners use combustion to remove the PFCs and other compounds from the effluent gas stream

Methodology Applied
Scientific EffectCombustion: Combustion

Implementation Method 4

the amount of air passing through the foraminous burner being sufficient to consume not only the fuel gas supplied to the burner, but also all the combustibles in the gas stream mixture

Methodology Applied
Scientific EffectOxidation: Oxidation

Data Source

PatentEP3980691B1Inlet assembly for an abatement apparatus
Publication Date: 2023.10.25 EDWARDS LTD
  • EP3980691B1 patent drawingFigure 1~2
  • EP3980691B1 patent drawingFigure 3~4
  • EP3980691B1 patent drawingFigure 5A~5B

AI summary

An inlet assembly for an abatement apparatus and a method are disclosed. The inlet assembly is for an abatement apparatus and comprises: an inlet nozzle defining a non-circular inlet aperture coupleable with an inlet conduit providing an effluent gas stream for treatment by the an abatement apparatus, at least one outlet aperture and a nozzle bore extending along a longitudinal axis between the non-circular inlet aperture and the outlet aperture for conveying the effluent gas stream from the non-circular inlet aperture to the outlet aperture for delivery to a treatment chamber of the abatement apparatus, the nozzle bore defining an inlet portion extending from the non-circular inlet aperture, a flow-dividing structure positioned downstream of the inlet portion and configured to separate the effluent gas stream into at least a pair of effluent gas streams and an outlet portion extending to the outlet aperture and configured to convey the pair of effluent gas streams to the treatment chamber of the an abatement apparatus. In this way, multiple effluent gas streams are generated or produced by the inlet assembly which helps to improve the performance of the abatement apparatus, particularly at low flow rates.