Inline Block Copolymer Mixer for Directed Self-Assembly
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Solution Overview
Problem
Directed self-assembly in semiconductor processing faces challenges such as batch-to-batch variability in block copolymer mixtures, leading to inconsistent critical dimensions and pitches, and the need for multiple pre-packaged mixtures for different feature sizes, which increases costs and complexity.
Innovation Solution
Forming block copolymer mixtures within the fabrication facility using inline mixers allows for consistent composition between batches, enabling precise control over feature metrics like critical dimension, pitch, and pattern fill density, and allowing for the tuning of mixtures to meet target specifications without the need for multiple vendor-supplied mixtures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If pre-packaged block copolymer mixtures from multiple vendors are used to achieve different feature sizes, then the ability to form various critical dimensions is improved, but the complexity and cost of managing multiple mixtures increases
Solution Approach 1:
The patent implements a single automated mixer system that can prepare multiple different block copolymer mixture compositions on-demand. The system uses programmable control to vary the ratios of different block copolymers and solvents, enabling one universal mixer to replace multiple vendor-specific pre-packaged mixtures while maintaining the ability to form various critical dimensions and pitches
Solution Approach 2:
The mixer system is designed with dynamic control capabilities, allowing the composition of block copolymer mixtures to be adjusted in real-time based on the desired feature specifications. The system can change mixture ratios, concentrations, and formulations dynamically without requiring physical reconfiguration or更换 of equipment, thereby reducing complexity while maintaining versatility
2Ease of manufacture
If pre-packaged block copolymer mixtures are used, then the process is simplified, but batch-to-batch variability leads to inconsistent critical dimensions and pitches
Solution Approach 1:
The automated mixer system incorporates feedback control mechanisms that monitor and adjust the composition of block copolymer mixtures during preparation. By measuring actual mixture properties and comparing them to target specifications, the system makes real-time corrections to ensure consistent critical dimensions and pitches across all batches, eliminating the variability inherent in pre-packaged mixtures
Solution Approach 2:
The system maintains ease of manufacture by automating the mixing process, but improves precision by dynamically controlling critical parameters such as mixture composition ratios, solvent concentrations, and mixing conditions. These parameter changes are precisely controlled through programmable logic to ensure batch-to-batch consistency while maintaining operational simplicity
3Adaptability or versatility
If multiple pre-packaged block copolymer mixtures are maintained for different feature sizes, then the ability to produce various IC features is improved, but the cost and inventory complexity increase
Solution Approach 1:
The system segments the block copolymer materials into separate storage containers, with each container holding a specific base block copolymer or solvent. The automated mixer then combines these segmented components in programmed ratios to create the required mixture compositions, eliminating the need to maintain complete pre-packaged mixtures in inventory while still enabling production of various IC features
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures consistent and cost-effective production of ICs by eliminating batch-to-batch variability and reducing the complexity and cost associated with managing multiple pre-packaged block copolymer mixtures, while also enabling the fabrication of multiple layers with different critical dimensions and pitches on the same substrate.
Implementation Method 1
directed self-assembly allows forming small device elements using self-assembling block copolymers
Implementation Method 2
the molecular weight of the block copolymer mixture controls the critical dimension, pitch, and phase (shape) of the formed device elements
Data Source
AI summary
A method for forming a device includes blending, in a mixer within a fabrication facility, a first liquid including a first block copolymer with a second liquid including a second block copolymer to form a first mixture. The first block copolymer includes a first homopolymer and a second homopolymer, where the first homopolymer has a first mole fraction in the first liquid. The second block copolymer includes the first homopolymer and the second homopolymer, the first homopolymer having a second mole fraction in the second liquid, the first mole fraction being different from the second mole fraction. The method includes placing a substrate over a substrate holder of a processing chamber within the fabrication facility; and coating the substrate with the first mixture within the processing chamber.