Inline Concentration Measurement Device with Oblique Gas Flow Paths
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Solution Overview
Problem
Inline concentration measurement devices in semiconductor manufacturing equipment face frequent window member replacements due to accumulation of organic metal materials, which disrupt gas flow and measurement accuracy.
Innovation Solution
The device incorporates a measurement cell with obliquely extending communication parts for gas inlets and outlets, reducing gas retention near window members by enhancing gas flow speed and using smaller cross-sectional areas for communication paths to minimize material accumulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the gas flow path has a straight optical path between window members, then measurement accuracy is improved, but organic metal material accumulates on window members due to gas retention in dead spaces
Solution Approach 1:
The communication parts are designed with asymmetric oblique extensions rather than symmetric straight paths. The first communication part obliquely extends from the gas inlet toward the window member, and the second communication part obliquely extends from the gas outlet toward the window member, creating asymmetric flow paths that eliminate dead spaces while maintaining the straight optical measurement path
Solution Approach 2:
The communication parts extend in multiple dimensions rather than following a simple linear path. By having communication parts that obliquely extend in different directions (first from inlet toward window member, second from outlet toward window member), the design adds dimensional complexity to the gas flow path, eliminating retention zones while preserving the straight optical path for measurement
2Speed
If communication parts have larger cross-sectional areas, then gas flow is improved, but material accumulation increases on window members
Solution Approach 1:
The cross-sectional area of communication parts is optimized locally rather than uniformly throughout the system. The first and second communication parts have smaller cross-sectional areas compared to the main gas flow path, creating localized flow restrictions that increase gas flow speed in specific regions near the window members, thereby reducing material accumulation in those critical areas
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces unwanted accumulation of organic metal materials on window members, maintaining measurement accuracy and extending the lifespan of window components.
Implementation Method 1
measuring gas concentration in the gas supply line based on a principal of an absorptiometric method
Implementation Method 2
light having a prescribed wavelength emitted from a light source 1 including a light emitting diode is transmitted to a light incident part 3 through an optical fiber 2, then entered to a gas flow path 5 through a window member 4 made of quartz glass, sapphire glass or the like equipped in the light incident part 3 to be absorbed by gas in the gas flow path 5
Implementation Method 3
The photo diode 7 converts the detected light into an electrical signal and outputs
Data Source
AI summary
An inline concentration measurement device comprises: a measurement cell main body with a gas flow path formed; a light incident part with a window member connected to the main body; and a light receiving part with a window member connected to the main body, wherein the gas flow path includes a gas flow path for an optical path extending straight between the window members of the light incident part and the light receiving part, a first communication part making a gas inlet formed in the main body communicate with the gas flow path part for the optical path, and a second communication part making a gas outlet formed in the main body communicate with the gas flow path part for the optical path, and the first communication part obliquely extends from the gas inlet towards the window member of the light incident part.