Inline Dispense Capacitor for Semiconductor Fluid Flow Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Semiconductor fabrication processes face challenges in maintaining specified fluid flow rates during chemical dispensing, as fine filters required for purity can reduce flow rates, leading to defects on substrates, and existing systems struggle to efficiently handle multiple fluid types without requiring separate pumps or causing defects due to system geometry.
Innovation Solution
A system incorporating dispense capacitors with flexible membranes or bladders that can expand or contract to maintain flow rates and pressure, allowing for efficient filtration and dispensing of multiple fluids using a common pressure-control chamber and bladders that can independently collect, hold, and dispense fluid, eliminating the need for separate pumps and minimizing defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If relatively fine filters are used to filter chemicals immediately prior to dispensing, then chemical purity is improved and defects are avoided, but fluid flow rate decreases
Solution Approach 1:
The system performs preliminary filtration of chemicals before they enter the dispense capacitor, so that the filtered chemical can be stored and dispensed at the required flow rate without being constrained by the slow filtration process during actual dispensing operations
Solution Approach 2:
The system separates the filtration function from the dispensing function by using a dispense capacitor as a buffer between the filter and the dispense nozzle, allowing each process to operate independently at its optimal rate
2Adaptability or versatility
If multiple different types of fluids are dispensed from a single tool, then device versatility is improved, but system complexity increases
Solution Approach 1:
The dispense capacitor system is designed with a common pressure-control chamber that can accommodate multiple bladders for different fluid types, allowing a single tool to perform multiple dispensing functions without requiring separate pumps for each fluid
Solution Approach 2:
The system merges multiple fluid delivery paths into a single pressure-control chamber where all bladders are controlled by a common pressure-control mechanism, reducing the overall system complexity while maintaining multi-fluid capability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system compensates for slow filtration rates while maintaining specified dispense flow rates, reduces defects by ensuring continuous fluid flow, and enables efficient dispensing of multiple fluids without the need for separate pumps, thereby improving the reliability and efficiency of semiconductor fabrication processes.
Implementation Method 1
The dispense capacitor includes a flexible membrane or surface that selectively flexes to either increase or decrease fluid flow and/or pressure
Implementation Method 2
The common pressure-control fluid is in contact with an exterior surface of each bladder of the plurality of bladders... the common pressure-control fluid exerted on each bladder
Data Source
AI summary
A fluid dispensing apparatus and method is disclosed. Systems include an in-line or linear bladder apparatus array configured to expand to collect a charge of fluid, and contract to assist with fluid delivery and dispensing. The bladder array is disposed within a chamber of pressure control fluid common to exterior surfaces of each bladder in the bladder array. Simultaneously, some bladders within the array of linear bladders can be dispensing fluid or maintaining fluid while some bladders are collecting fluid. A given filtration rate can be less than a dispense rate and thus the system herein compensates for filter-lag that often accompanies fluid filtering for microfabrication, while providing a generally linear configuration that reduces chances for defect creation. With multiple bladders, multiple different types of fluid can be readied for selective dispense.