Inline Fluid Mixing Layout for Stable Concentration Control
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Solution Overview
Problem
Existing fluid mixing devices face challenges in accurately controlling the concentration and flow rate of mixed fluids, particularly in the semiconductor industry, where changes in concentration due to stagnation and accumulation of solid components can occur, leading to inaccurate mixing and difficult cleaning.
Innovation Solution
A fluid mixing device with a configuration that includes a fluid mixing unit, concentration measurement unit, flow rate measurement unit, and flow rate control unit, where the concentration and flow rate control units are arranged downstream to measure and adjust the mixed fluid's concentration and flow rate using pinch valves with elastic tubes, preventing stagnation and accumulation, and ensuring a linear flow passage to maintain accurate concentration control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a tank-based mixing system is used to control concentration, then mixing accuracy is improved, but equipment size becomes large and flow passage structure becomes complicated
Solution Approach 1:
The invention extracts the mixing function from a traditional tank-based system and implements it directly in the flow passage. The mixing unit is integrated into the fluid transport line, eliminating the need for separate large mixing tanks while maintaining concentration control accuracy through direct inline mixing and real-time sensor feedback.
Solution Approach 2:
The invention merges multiple functions (mixing, concentration measurement, flow rate control) into a single integrated flow passage system. The concentration measurement unit and flow rate control unit are combined within the same flow path, simplifying the overall equipment structure while maintaining precise control capabilities.
2Device complexity
If in-line mixing without a tank is used, then equipment size is reduced, but flow rate becomes uncontrollable
Solution Approach 1:
The invention implements a feedback control system where the flow rate measurement unit continuously monitors the actual flow rate of the mixed fluid and provides this information to the flow rate control unit. The control unit adjusts the mixing parameters based on this feedback to maintain precise flow rate control despite the compact in-line mixing design.
3Volume of moving object
If a curved portion is present in the flow passage, then space utilization is improved, but stagnation occurs and solid components accumulate causing concentration changes
Solution Approach 1:
The invention applies curvature principles strategically - using curved portions only where necessary for compact layout while ensuring they are positioned downstream of the mixing unit and measurement units. The main flow path maintains adequate curvature radii to prevent stagnation, and the elastic tube in the pinch valve is arranged linearly to avoid accumulation issues.
4Ease of operation
If conventional valves are used for flow control, then flow rate adjustment is achieved, but stagnation and accumulation occur leading to concentration changes
Solution Approach 1:
The invention replaces conventional rigid valve structures with a pinch valve using an elastic tube. The elastic tube can be pinched by the pinch member to control flow rate adjustment, while its flexible nature prevents dead zones and stagnation areas that cause solid component accumulation, thereby maintaining concentration stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively controls the concentration and flow rate of mixed fluids, preventing changes in concentration and facilitating easy cleaning, thereby ensuring accurate and reliable fluid mixing, especially for slurry fluids, by using a pinch valve with an elastic tube to manage flow and prevent stagnation.
Implementation Method 1
the flow rate control unit comprising a pinch valve having an elastic tube
Data Source
AI summary
A fluid mixing device includes a fluid mixing unit, a concentration measurement unit, a mixing ratio control unit controlling a mixing ratio of different fluid components in the fluid mixing unit based on a concentration of a mixed fluid measured by the concentration measurement unit, a flow rate measurement unit, and a flow rate control unit controlling a flow rate of the mixed fluid based on the flow rate of the mixed fluid measured by the flow rate measurement unit. The concentration measurement unit, the flow rate measurement unit, and the flow rate control unit are arranged on the downstream side of the fluid mixing unit. A flow passage of the concentration measurement unit, a flow passage of the flow rate measurement unit, and the elastic tube of the flow rate control unit are arranged to extend along a flow passage axis on a line with each other.