Inner Pod Holding Device for EUV Lithography Dust Reduction
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional inner pod inspections in semiconductor manufacturing, particularly in EUV lithography, face the challenge of dust contamination due to the movement and positioning of inner pods during inspection.
Innovation Solution
An inner pod holding device with a separator defining a concealing space and a holding space, featuring movable positioning modules concealed in the concealing space to minimize dust generation, along with optional aligning centers, tactile sensors, and optical sensors for precise positioning and inspection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the inner pod is moved and positioned during inspection, then the inspection can be performed, but dust is generated due to friction
Solution Approach 1:
The inspection system is divided into two independent parts: the inner pod remains stationary in the holding space, while the inspection components (optical sensors, cameras) are mounted on movable carriers that move in the concealing space. This segmentation allows inspection without moving the inner pod, thus preventing dust generation from friction.
Solution Approach 2:
Movable carriers act as intermediaries between the stationary inner pod and the inspection system. These carriers hold the inspection components and move them into position, allowing the inner pod to remain undisturbed while still enabling comprehensive inspection through the movement of the intermediary carriers.
2Object-generated harmful factors
If the inner pod remains stationary during inspection, then dust contamination is reduced, but positioning and accessibility for inspection becomes difficult
Solution Approach 1:
While the inner pod remains stationary, the inspection system introduces dynamic elements through movable carriers that can position inspection components at different locations and angles. This allows flexible access to the inner pod from multiple positions without requiring the pod itself to move, maintaining both cleanliness and operational ease.
3Ease of operation
If movable positioning members are exposed, then positioning is easier, but dust contamination increases
Solution Approach 1:
The movable positioning members and inspection components are nested within the concealing space, which is separated from the holding space by the separator. This nested arrangement allows the positioning members to move freely within the concealing space without exposing them to the clean environment of the holding space, thus maintaining ease of positioning while preventing dust contamination.
Data Source
AI summary
An inner pod holding device conducive to reducing dust contamination comprises a separator, a plurality of supporters, a first positioning module, and a second positioning module. The separator defines a concealing space and a holding space. The plurality of supporters is disposed in the holding space. The first positioning module includes a first driving member and at least one first positioning member. The first driving member is disposed in the concealing space and configured to move in a first direction. The second positioning module includes a second driving member and at least one second positioning member. The second driving member is disposed in the concealing space and configured to move in a second direction. The first and second positioning members each have a top portion protruding to the holding space. An optical inspection apparatus with the inner pod holding device is further provided.