Detachable Inner Wall Fixing for Easier Substrate Chamber Maintenance
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in easily performing maintenance of the inner wall member, which is crucial for efficient operation and longevity.
Innovation Solution
A substrate processing apparatus is designed with a detachable inner wall member system, utilizing a contact member that applies a spring reaction force for fixation and an actuator to release the fixation, enabling easy removal and replacement of the inner wall member.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the inner wall member is fixed firmly to the support member, then the reliability of the connection is improved, but the ease of maintenance deteriorates
Solution Approach 1:
The fixing mechanism is segmented into multiple contact members distributed around the inner wall member, allowing the connection to be divided into multiple independent contact points. This enables reliable fixation during operation while allowing easy release during maintenance by simply moving the inner wall member downward to disengage from any single contact member.
Solution Approach 2:
The contact members are designed with elastic deformation capability, transforming from a static rigid connection to a dynamic flexible connection. The elastic bodies can deform to accommodate the inner wall member during installation and maintenance, providing reliable fixation during operation while enabling easy removal when needed.
2Strength
If a complex fixing mechanism is used to securely attach the inner wall member, then the connection strength is improved, but the device complexity increases
Solution Approach 1:
The elastic contact members automatically perform the fixation function through their own elastic deformation when the inner wall member is installed. The system uses the installation process itself to compress the elastic bodies, which then self-generate the fixing force without requiring additional actuators or complex control mechanisms.
Solution Approach 2:
The complex mechanical fastening system (screws, clips, or latches) is replaced with a simpler elastic deformation-based system. The elastic bodies provide the necessary connection strength through material elasticity rather than through complex mechanical interlocking mechanisms.
3Ease of repair
If the inner wall member is made detachable for easy maintenance, then the ease of maintenance is improved, but the reliability of the connection deteriorates
Solution Approach 1:
The connection state is controlled by changing the vertical position parameter of the inner wall member. During operation, the member is positioned upward to engage with the contact members for reliable fixation. During maintenance, the member is moved downward to disengage, providing easy removal. The same structural design accommodates both states reliably.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates easy maintenance of the inner wall member, enhancing operational efficiency and extending the apparatus's lifespan by simplifying the maintenance process.
Implementation Method 1
a contact member including an elastic body configured to apply a spring reaction force to the other of the support member and the inner wall member in a horizontal direction
Data Source
AI summary
There is a substrate processing apparatus comprising: a chamber including a sidewall having an opening; a substrate support disposed in the chamber; a support member disposed above the substrate support; an inner wall member having a ceiling portion disposed above the substrate support and below the support member; a contact member attached to one of the support member and the inner wall member and configured to detachably fix the inner wall member to the support member by applying a spring reaction force to the other of the support member and the inner wall member in a horizontal direction; and an actuator configured to move the inner wall member downward to release the fixing of the inner wall member to the support member.