Inorganic LED Separation With Protective Insulating Layers

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Solution Overview

Problem

The manufacturing process of inorganic light emitting diodes (LEDs) using chemical methods often damages the insulating material layer surrounding the outer surface of the light emitting element, leading to potential damage and inefficiencies.

Innovation Solution

A manufacturing method involving the use of a protective layer with different etch selectivity to an etchant, comprising a first and second insulating layer, is applied to form a light emitting element with a flat and parallel end surface, ensuring the insulating material layer is protected during separation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If chemical method is used to separate the light emitting element, then the element rod can be separated from the lower substrate, but the insulating material layer surrounding the outer surface is partially damaged

Engineering Contradiction:
Improveseparation processVSAvoidinsulating material layer integrity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

A protective layer is introduced as an intermediary between the insulating material layer and the etchant. This protective layer has high etch selectivity resistance, preventing the etchant from damaging the insulating material layer while still allowing the separating layer to be removed for element rod separation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The protective layer is formed on the insulating material layer before the chemical separation process. This preliminary protective coating ensures that when the etchant is applied to remove the separating layer, the insulating material layer is already protected and will not be damaged during the separation process.

Inventive Principle:
Principle #10Preliminary action

2Device complexity

If chemical separation is performed without protective layer, then the manufacturing process is simple, but the surface roughness increases and causes open or short circuits

Engineering Contradiction:
Improvemanufacturing process structureVSAvoidelectrical connection reliability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The protective layer serves as a mediator that protects the insulating material layer during chemical separation. This additional layer prevents surface roughness and electrical defects without significantly complicating the overall manufacturing process, as it can be integrated into existing deposition steps.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The protective layer provides beforehand cushioning by being positioned between the etchant and the insulating material layer. This protective barrier prevents direct contact between the etchant and the insulating material layer, cushioning against potential damage before it can occur.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method prevents damage to the insulating material layer and ensures a flat, parallel surface, reducing the risk of open or short circuits in the light emitting element, enhancing manufacturing precision and reliability.

Implementation Method 1

the second insulating layer may have an etch selectivity with respect to the etchant, which is greater than an etch selectivity of the separating layer with respect to the etchant

Methodology Applied
Scientific EffectEtch selectivity:

Data Source

PatentUS12401003B2Manufacturing method for forming an inorganic light emitting element having a low surface roughness
Publication Date: 2025.08.26 SAMSUNG DISPLAY CO LTD
  • US12401003B2 patent drawing
  • US12401003B2 patent drawing
  • US12401003B2 patent drawing

AI summary

Provided are a light emitting device, a method for manufacturing same, and a display device including the light emitting device. The method for manufacturing the light emitting device comprises the steps of: preparing a lower substrate including a substrate and a buffer semiconductor layer formed on the substrate, forming an element rod by forming a separating layer disposed on the lower substrate, forming a first conductivity type semiconductor layer, an active material layer, and a second conductivity type semiconductor layer on the separating layer, and etching the first conductivity type semiconductor layer, the active material layer, the second conductivity type semiconductor layer, and the separating layer in a direction perpendicular to the lower substrate, forming a first insulating layer surrounding an outer circumferential surface of the element rod, forming a second insulating layer surrounding an outer circumferential surface of the first insulating layer and separating the element rod from the lower substrate to form a light emitting element.