Inorganic Particles for Crack-Suppressing Semiconductor Connection Materials

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Solution Overview

Problem

Conventional connecting materials fail to adequately suppress cracking in connection parts under stress loads, which can lead to reliability issues in semiconductor devices.

Innovation Solution

Particles with specific properties, such as an average diameter of 0.1 μm to 15 μm, a 10% K value between 3000 N/mm² and 20000 N/mm², and a particle diameter CV value of 50% or less, are used to form a connecting material that enhances the thickness and strength of the connection part, preventing cracking during stress loads.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional connecting materials are used, then the connection part can be formed, but cracking occurs during stress load

Engineering Contradiction:
Improvecrack suppressionVSAvoidconnection strength
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent applies parameter changes by carefully controlling the particle diameter (0.1-15 μm), particle diameter CV value (50% or less), and 10% K value (3000-20000 N/mm²) of the inorganic particles to achieve optimal stress distribution and crack suppression in the connection part

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses composite materials by combining inorganic particles with a glass phase and/or metal phase in the connecting material, creating a multi-phase composite that provides both mechanical strength and stress relaxation properties to prevent cracking

Inventive Principle:
Principle #40Composite materials

2Manufacturing precision

If particle diameter is reduced to enhance filling, then manufacturing precision improves, but particle strength decreases

Engineering Contradiction:
Improveparticle size controlVSAvoidparticle strength
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The patent optimizes the particle diameter parameter to a specific range (0.1-15 μm) with a CV value of 50% or less, balancing the benefits of fine particle filling with the need to maintain sufficient particle strength to prevent cracking during connection formation

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solution effectively suppresses cracking and increases connection strength by acting as a stress relaxation material, ensuring the durability of the connection part in semiconductor devices.

Implementation Method 1

the particles have a 10% K value of exceeding 3000 N/mm2 and 20000 N/mm2 or less, and the particles have a particle diameter CV value of 50% or less... effectively suppresses cracking and increases connection strength by acting as a stress relaxation material

Methodology Applied
Scientific EffectStress relaxation: Stress Relaxation

Data Source

PatentUS11027374B2Particles, connecting material and connection structure
Publication Date: 2021.06.08 SEKISUI CHEMICAL CO LTD
  • US11027374B2 patent drawing
  • US11027374B2 patent drawing
  • US11027374B2 patent drawing

AI summary

Particles that can suppress the occurrence of cracking during a stress load in a connection part that connects two members to be connected are provided. The particles according to the present invention are particles used to obtain a connecting material for forming the connection part that connects two members to be connected, and the particles are used for forming the connection part such that thickness of the connection part after connection exceeds twice the average particle diameter of the particles before connection, or the particles have an average particle diameter of 0.1 μm or more and 15 μm or less, the particles have a 10% K value of exceeding 3000 N/mm2 and 20000 K/mm2 or less, and the particles have a particle diameter CV value of 50% or less.