In-Situ Vacuum Electrical Characterization of Surface-Modified Devices

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Solution Overview

Problem

Current characterization techniques for nanomaterials and organic thin films are time and cost intensive due to the need for packaging and separate analysis systems, and they fail to effectively manipulate the electronic and optoelectronic properties of these materials, particularly in controlling carrier type and concentration for device applications.

Innovation Solution

A system comprising a vacuum chamber evacuated to near ultra-high vacuum pressures, with a sample holder for electrical connection and a source system for exposing the surface/interface to modification species, allowing in-situ measurement of electrical properties during surface/interface functionalization.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If separate analysis systems and packaging are used for characterizing surface/interface functionalized devices, then device reliability is maintained, but time consumption and cost increase significantly

Engineering Contradiction:
Improvedevice reliabilityVSAvoidcharacterization time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent combines the vacuum chamber used for surface/interface functionalization with the electrical characterization system into a single integrated platform. This allows the device to be functionalized and measured without removal or repackaging, eliminating the time-consuming separate analysis step while maintaining device reliability through continuous operation in the same controlled environment.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The vacuum chamber is designed to serve multiple functions: it acts as both the functionalization environment (for depositing surface/interface layers) and the measurement environment (for electrical characterization). This multi-functionality eliminates the need for separate packaging and analysis systems, significantly reducing characterization time while maintaining reliability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If multiple packed devices with different surface/interface functionalization are analyzed separately, then comprehensive characterization is achieved, but cost and time consumption increase

Engineering Contradiction:
Improvecharacterization comprehensivenessVSAvoidcharacterization efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The integrated system allows multiple devices with different surface/interface functionalizations to be loaded simultaneously into the same vacuum chamber and characterized in parallel. This maintains comprehensive characterization capabilities while dramatically improving productivity by eliminating sequential processing and repackaging requirements.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The system enables continuous characterization of multiple devices without interruption or repackaging. Devices can be functionalized and measured in a continuous workflow within the same vacuum environment, eliminating idle time and maintaining both comprehensiveness and efficiency.

Inventive Principle:
Principle #20Continuity of useful action

3Illumination intensity

If fine focusing of laser beam using optical microscopic setup is used outside controlled environment, then light beam quality is improved, but device exposure to air degradation occurs

Engineering Contradiction:
Improvelight beam qualityVSAvoidair exposure degradation
Core Design Contradiction:
Illumination intensityVSObject-affected harmful factors

Solution Approach 1:

The optical microscopic setup and laser beam focusing system are integrated within the vacuum chamber, allowing high-quality light beam focusing to be achieved without removing the device from the controlled vacuum environment. This eliminates air exposure degradation while maintaining illumination quality.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The vacuum chamber provides an inert atmosphere that protects the surface/interface functionalized device from air degradation during optical measurement. The laser beam focusing is performed within this protected environment, ensuring both high light beam quality and device stability.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient and reliable manipulation of electronic and optoelectronic properties, significantly enhancing device performance by allowing real-time electrical measurements and fine-focused light illumination, thereby improving the characterization and functionalization of nanomaterials and organic thin films.

Implementation Method 1

a pump system coupled to the vacuum chamber for evacuation the vacuum chamber to near ultra high vacuum pressures of about 10−8 mbar or lower

Methodology Applied
Scientific EffectVacuum: Vacuum

Implementation Method 2

a source system for exposing a surface/interface of the functional device to a modification species

Methodology Applied
Scientific EffectDeposition: Deposition (physical)

Data Source

PatentUS12046521B2In situ electrical properties characterization system towards surface/interface engineered functional devices
Publication Date: 2024.07.23 NATIONAL UNIVERSITY OF SINGAPORE
  • US12046521B2 patent drawing
  • US12046521B2 patent drawing
  • US12046521B2 patent drawing

AI summary

A system and method for in-situ characterization of functional devices. The system comprises a vacuum chamber; a pump system coupled to the vacuum chamber for evacuation the vacuum chamber to near ultra high vacuum pressures of about 10−8 mbar or lower; a sample holder for a functional device based on nanostructured materials disposed inside the vacuum chamber and configured to provide electrical connection to the functional device for measuring electrical properties of the functional device; and a source system for exposing a surface/interface of the functional device to a modification species; whereby the system is configured to measure the electrical properties of the functional device in-situ upon the exposure to the modification species.