Inspecting Device With Dual-Index Table And T-Shaped Arm
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Solution Overview
Problem
Existing inspecting devices for semiconductor devices face challenges in efficiently conducting static and dynamic characteristic tests across different environments without damaging the index table, leading to increased size and cost due to the need for separate handling mechanisms for the device and its mount.
Innovation Solution
The implementation of an inspecting device with a dual-index table system and a T-shaped rotary arm that allows for the transfer and replacement of semiconductor devices and mounts using a single arm, enabling tests in both room-temperature and high-temperature environments without unnecessary size or cost increments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a semiconductor device is directly placed on the index table for testing, then the testing process is simplified, but the index table may be damaged by defective devices
Solution Approach 1:
A mount is introduced as an intermediary component between the semiconductor device and the index table. The mount serves as a protective mediator that absorbs potential damage from defective devices while allowing electrical contact for testing, thus protecting the index table without complicating the testing process
2Reliability
If a replaceable mount is used to protect the index table, then the index table integrity is maintained, but separate handling mechanisms for device and mount are needed, increasing device size and cost
Solution Approach 1:
The device handling mechanism and mount handling mechanism are merged into a single integrated arm system. The arm can perform both device-to-mount transfer and mount-to-index-table placement operations, eliminating the need for separate handling mechanisms and reducing overall device complexity while maintaining index table protection
Solution Approach 2:
The arm is designed as a universal handling tool that performs multiple functions: transferring devices to mounts, placing mounts on the index table, and potentially retrieving devices or mounts. This multi-functional approach eliminates redundant mechanisms and reduces device size and cost
Data Source
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AI summary
The present invention reduces a size and lowers a cost of an inspecting device that includes an index table on which a device is placed via a replaceable mount. An inspecting device includes an index table and an arm. The index table has a device placement region in which a device is placed via a mount that is replaceable. The arm has a device sucking head and a mount sucking head, the device sucking head being configured to suck the device, the mount sucking head being configured to suck the mount. (Fig. 1)