Inspection apparatus and inspection method
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Solution Overview
Problem
Existing inspection systems require large and costly chiller units to control wafer temperatures, which increase footprint and cost, and face challenges in maintaining consistent temperature distribution across multiple inspection chambers.
Innovation Solution
The inspection apparatus features a refrigerant supplier with a series-connected refrigerant gas pipe system and heat exchangers between chuck tops, allowing for efficient heat dissipation and temperature control using refrigerant gas, eliminating the need for a chiller unit and reducing system complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a chiller unit is used to control wafer temperature, then temperature control is achieved, but system size and cost increase
Solution Approach 1:
The patent extracts the cooling function from a centralized chiller unit and distributes it to individual heat exchangers at each chuck top. This allows temperature control to be achieved locally at each inspection chamber without requiring a large centralized cooling system, thereby reducing overall system size while maintaining temperature control capability
Solution Approach 2:
The patent segments the temperature control system into multiple independent heat exchanger units, each serving a specific chuck top. This segmentation allows for decentralized temperature management across multiple inspection chambers, reducing the need for a single large chiller unit and simplifying the overall system architecture
2Temperature
If a chiller unit is used to control wafer temperature, then temperature control is achieved, but system cost increases
Solution Approach 1:
By dividing the temperature control function into multiple small heat exchanger units rather than one large chiller, the system reduces manufacturing costs through standardized, modular components that are cheaper to produce and install
Solution Approach 2:
The patent removes the expensive centralized chiller unit from the system and replaces it with simpler, less costly heat exchanger elements distributed throughout the inspection chambers, thereby achieving temperature control at lower system cost
3Productivity
If multiple inspection chambers are used, then inspection capacity increases, but temperature distribution consistency becomes difficult to maintain
Solution Approach 1:
The patent segments the temperature control system so that each inspection chamber has its own heat exchanger unit, allowing independent temperature management in each chamber. This ensures that temperature consistency is maintained across multiple chambers without requiring complex centralized control, thereby supporting increased inspection capacity while maintaining thermal stability
Solution Approach 2:
The patent implements local temperature control at each chuck top through dedicated heat exchangers, allowing each inspection chamber to maintain its own optimal temperature independently. This local quality approach ensures consistent temperature distribution across multiple chambers, supporting higher productivity without compromising thermal uniformity
4Device complexity
If a refrigerant gas pipe system is used instead of a chiller unit, then system complexity is reduced, but heat dissipation efficiency must be maintained
Solution Approach 1:
The patent uses a refrigerant gas distribution system with pipes and valves to deliver cooling refrigerant directly to heat exchangers at each chuck top. This pneumatic/hydraulic approach replaces complex electrical chiller control systems with simpler fluid-based temperature management, reducing system complexity while maintaining effective heat dissipation through the refrigerant cycle
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration simplifies heat removal from wafers, reduces system size and cost, and maintains consistent temperature across multiple inspection chambers, while effectively managing temperature fluctuations.
Implementation Method 1
a first heat exchanger disposed in the refrigerant gas pipe between the chuck tops to exchange heat with the refrigerant gas discharged from the chuck tops
Implementation Method 2
Each of the chuck tops includes a heater configured to heat the inspection object and a temperature sensor
Data Source
AI summary
An inspection apparatus includes: inspection chamber rows in each of which inspection chambers are arranged, the inspection chamber rows arranged in multiple stages and each of the inspection chambers being configured to accommodate therein a tester configured to inspect an inspection object on a chuck top; a refrigerant supplier configured to supply a refrigerant gas; and a controller. The refrigerant supplier includes: a refrigerant gas pipe connecting the chuck tops in each inspection chamber row to allow the refrigerant gas to pass therethrough; and a first heat exchanger disposed in the refrigerant gas pipe between the chuck tops to exchange heat with the refrigerant gas discharged from the chuck tops. Each of the chuck tops includes a heater configured to heat the inspection object and a temperature sensor. The controller is configured to control the heater based on a temperature detected by the temperature sensor.