Foreign Substance Inspection Apparatus Dynamic Sensitivity Adjustment
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Solution Overview
Problem
Existing foreign substance inspection apparatuses face challenges in detecting fine foreign substances on substrates due to saturation issues with high-sensitivity detection systems, leading to increased apparatus size and reduced productivity in limited layouts, and require multiple sensitivity changes for accurate detection, which impairs productivity.
Innovation Solution
A foreign substance inspection apparatus with a detection unit that includes a light projector, a light receiver, and an adjustment mechanism to adjust light quantity, allowing for high-sensitivity detection initially and switching to low-sensitivity mode based on results, optimizing detection without the need for multiple sensitivity changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a photomultiplier tube with extremely high sensitivity is used to detect fine foreign substances, then detection sensitivity is improved, but the apparatus size increases and layout space is insufficient
Solution Approach 1:
A single detection system is designed to perform multiple functions by dynamically adjusting its sensitivity level. The detection unit can operate in high-sensitivity mode for fine foreign substances and low-sensitivity mode for larger foreign substances, eliminating the need for multiple separate detection systems with different sensitivities.
Solution Approach 2:
The sensitivity of the detection unit is made dynamically adjustable during operation. The control unit changes the sensitivity level based on the inspection requirements and foreign substance characteristics, allowing the system to adapt between high-sensitivity and low-sensitivity modes without physical reconfiguration.
2Measurement precision
If sensitivity of the detection system is changed at each foreign substance inspection to perform measurement multiple times, then detection accuracy is improved, but measurement time increases and productivity decreases
Solution Approach 1:
The system performs a preliminary high-sensitivity detection to identify fine foreign substances first. Based on the results of this initial detection, the control unit determines whether a second low-sensitivity detection is needed. This preliminary action approach avoids unnecessary repeated measurements and optimizes the inspection process.
Solution Approach 2:
Instead of performing full multi-sensitivity measurements for every inspection, the system applies partial action by conducting only the necessary high-sensitivity detection for fine foreign substances. The control unit intelligently determines when additional low-sensitivity detection is required, avoiding excessive measurements and maintaining high productivity.
3Measurement precision
If high-sensitivity detection is used for all foreign substances, then fine foreign substances are detected accurately, but large foreign substances cause saturation and prevent accurate size detection
Solution Approach 1:
The detection unit dynamically adjusts its sensitivity level based on the foreign substance characteristics. High sensitivity is used for fine foreign substances to achieve accurate detection, while low sensitivity is switched to for large foreign substances to prevent saturation and enable accurate size measurement.
Solution Approach 2:
The sensitivity parameter of the detection unit is changed based on the detected foreign substance characteristics. The control unit adjusts the sensitivity level to match the foreign substance size, ensuring optimal detection conditions for both fine and large foreign substances without signal saturation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables efficient detection of both fine and larger foreign substances, preventing mold damage and improving productivity by determining the need for low-sensitivity mode based on high-sensitivity results, thus ensuring accurate inspection without significant throughput loss.
Implementation Method 1
applies light to the substrate, and receives light scattered from the foreign substance by a light receiver, thereby detecting the foreign substance
Implementation Method 2
electrons generated in a photoelectric cathode caused by incidence of light are accelerated by high voltage, and the electrons are brought into collision with a plurality of stages of dynodes for generation of secondary electrons
Data Source
AI summary
A foreign substance inspection apparatus according to the present invention detects a foreign substance on a substrate, and includes a detection unit that includes a light projector configured to project light to a surface of the substrate and a light receiver configured to receive scattered light from the surface, an adjustment mechanism configured to adjust a light quantity of the scattered light received by the light receiver, and a control unit configured to perform foreign substance detection in a state where sensitivity of the detection unit is changed to low sensitivity, after performing foreign substance detection in a state where the sensitivity of the detection unit is set to high sensitivity by adjusting the light quantity of the scattered light received by the light receiver.