Inspection Apparatus Light-Transmitting Ceiling Plate Temperature Control
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Solution Overview
Problem
Existing inspection apparatuses for backside-illumination type imaging devices face challenges in accurately measuring the temperature of the imaging device without obstructing the light irradiation, especially when using temperature sensors that can block light or are difficult to accurately measure due to low thermal conductivity materials.
Innovation Solution
The inspection apparatus includes a placing table with a ceiling plate made of a light transmitting material, an irradiation part that directs light towards the inspection target object, and a temperature controller. A pattern made of a metal material with a thickness that transmits light is formed on the ceiling plate or its opposite surface, allowing for accurate temperature measurement without blocking light.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a temperature sensor is used to measure the temperature of the imaging device, then temperature measurement capability is provided, but the sensor blocks light irradiation to the imaging device
Solution Approach 1:
A thin transparent heat-conducting adhesive is introduced as an intermediary between the temperature sensor and the imaging device. This adhesive layer allows thermal energy to be transmitted from the imaging device to the sensor while being transparent to inspection light, thus enabling temperature measurement without blocking light irradiation.
Solution Approach 2:
The patent employs a thin transparent adhesive film as a mediator. This thin film has sufficient thermal conductivity to transmit heat from the imaging device to the temperature sensor, while its transparency ensures it does not obstruct the inspection light path, resolving the contradiction between thermal measurement and optical inspection.
2Ease of operation
If a temperature sensor with low thermal conductivity material is used, then the sensor can be placed close to the imaging device, but accurate temperature measurement becomes difficult
Solution Approach 1:
The patent changes the thermal conductivity parameter of the adhesive material from low to high. By selecting a transparent adhesive with high thermal conductivity, the system achieves both close sensor placement and accurate temperature measurement, as the high thermal conductivity ensures efficient heat transfer despite the thinness of the adhesive layer.
3Illumination intensity
If a transparent material is used for the placing table to allow light transmission, then light irradiation is maintained, but temperature measurement capability is lost
Solution Approach 1:
The placing table is segmented into functional layers: a transparent upper plate for light transmission, a heat-conducting adhesive layer for thermal coupling, and a temperature sensor. This segmentation allows each layer to perform its specific function - the transparent plate maintains optical transmission while the adhesive layer enables thermal measurement.
Solution Approach 2:
The patent uses a composite structure combining transparent materials (for optical transmission) with heat-conducting materials (for thermal measurement). The transparent adhesive simultaneously provides optical transparency and thermal conductivity, creating a composite material that satisfies both requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables accurate temperature measurement of the imaging device during inspection, maintaining the integrity of light irradiation and overcoming the limitations of previous technologies.
Implementation Method 1
a pattern made of a metal material and having a thickness that transmits light is formed on at least one of the placing surface of the ceiling plate or a surface opposite to the placing surface
Implementation Method 2
a temperature controller configured to adjusts a temperature of the inspection target device of the inspection target object placed on the placing surface
Data Source
AI summary
An inspection apparatus for inspecting an inspection target device is presented. The inspection apparatus comprises a placing table that supports the inspection target object while facing the back surface of the imaging device, and the placing table includes: a ceiling plate made of a light transmitting material and having a placing surface on which the inspection target object is placed, an irradiation part that is disposed at a position facing the inspection target object with the ceiling plate interposed therebetween and that irradiates light toward the inspection target object placed on the placing surface; and a temperature controller configured to adjusts a temperature of the inspection target device of the inspection target object placed on the placing surface.