Inspection Chamber Dew Point Bypass for Lower Dry Air Use

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Solution Overview

Problem

Conventional inspection devices consume a large amount of dry air due to continuous supply during low temperature inspections to prevent dew condensation in the prober chamber.

Innovation Solution

An inspection device with a bypass pipe connecting the dry air supply section and the dew point meter, allowing for controlled dry air supply directly to the dew point meter during normal and high temperature inspections, reducing dry air consumption by minimizing its entry into the inspection chamber.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If dry air is continuously supplied into the inspection chamber to prevent dew condensation during low temperature inspection, then dew condensation is prevented, but dry air consumption increases

Engineering Contradiction:
Improvedew condensation preventionVSAvoiddry air consumption
Core Design Contradiction:
ReliabilityVSLoss of substance

Solution Approach 1:

The system segments the dry air supply path into two separate channels: one channel supplies dry air to the inspection chamber only when needed (during low temperature inspection), while another channel continuously supplies dry air to the dew point meter. This segmentation allows the dew point meter to maintain its dry state without requiring continuous dry air supply to the entire inspection chamber system.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The bypass pipe enables preliminary action by allowing the dew point meter to be pre-supplied with dry air through the bypass channel before low temperature inspection begins. This ensures the dew point meter is already in a dry state and ready for measurement, eliminating the need to pre-condition the entire inspection chamber with dry air.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If dry air is continuously supplied to maintain dew point in inspection chamber, then dew point control is maintained, but operational cost increases

Engineering Contradiction:
Improvedew point controlVSAvoidoperational cost
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The dry air supply system is segmented into selective supply paths using valves. The first valve controls dry air supply to the inspection chamber only when temperature is below the dew point, while the second valve enables continuous dry air supply to the dew point meter through the bypass pipe. This segmentation maintains dew point control reliability while eliminating unnecessary dry air consumption during normal and high temperature operations.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system changes the operational parameters of dry air supply based on temperature conditions. During low temperature inspection (when chamber temperature is below dew point), dry air is supplied to the chamber. During normal and high temperature inspection, dry air supply to the chamber is stopped while continuing supply to the dew point meter via the bypass. This parameter-based control maintains reliability while reducing operational costs.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS11614477B2Inspection device and method for operating inspection device
Publication Date: 2023.03.28 TOKYO ELECTRON LTD
  • US11614477B2 patent drawing
  • US11614477B2 patent drawing
  • US11614477B2 patent drawing

AI summary

An inspection device according to an embodiment can conduct high temperature inspection and low temperature inspection on an object to be inspected. The inspection device includes an inspection chamber in which inspection is conducted on the object; a dry air supply section that is connected to the inspection chamber via a first valve and that is configured to supply dry air into the inspection chamber; a dew point meter that is connected to the inspection chamber via a second valve and that is configured to measure a dew point in the inspection chamber; and a bypass pipe connecting the dry air supply section and the dew point meter via a third valve.