Integrated Inspection Coupon for Plasma-Resistant Coating Quality
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Solution Overview
Problem
Existing plasma-resistant coatings in semiconductor manufacturing, such as yttrium-based coatings, suffer from defects like voids, spalling, and contamination, leading to substrate contamination and process failures, particularly in extreme ultraviolet lithography systems.
Innovation Solution
The use of integrated inspection coupons with multiple faceted surfaces, coated with high-quality plasma-resistant coatings, allows for simultaneous analysis of various surfaces, reducing defects and improving quality control by providing multiple certificates of analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional plasma-resistant coatings (e.g., yttrium-based) are used, then coating coverage is achieved, but defects such as voids, spalling, and contamination occur leading to substrate contamination and process failures
Solution Approach 1:
The patent applies preliminary action by coating inspection coupons before actual components to establish quality benchmarks. The coupons are coated using the same process and materials, then analyzed to generate certificates of analysis that predict component quality before components are manufactured or inspected
Solution Approach 2:
The inspection coupon serves as an intermediary between the coating process and the actual components. It captures the coating quality characteristics and transmits this information through certificates of analysis, allowing indirect assessment of component quality without directly inspecting the components themselves
2Manufacturing precision
If multiple separate inspection coupons are used to represent different surfaces, then comprehensive quality coverage is achieved, but process complexity and time increase
Solution Approach 1:
The patent merges multiple inspection functions into a single integrated inspection coupon that features multiple surfaces with different curvatures. This single coupon represents multiple component surfaces, allowing simultaneous analysis of various coating conditions without requiring multiple separate coupons
Solution Approach 2:
The integrated inspection coupon is designed with multi-functionality, where a single coupon serves to represent flat surfaces, convex curvatures, and concave curvatures simultaneously. This universal coupon can be used across different component types and surface geometries, eliminating the need for specialized coupons for each surface type
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the precision and efficiency of quality control, reducing defects and contamination, thereby improving manufacturing yields and equipment longevity.
Implementation Method 1
The sidewall and at least one face of the integrated inspection coupon are coated with a metal oxide coating using a plasma spray process
Data Source
AI summary
To improve quality assurance and durability of coated components, a multifaceted inspection coupon is provided that includes opposing flat surfaces, separated by sides which include one or more curves or fillets representing surfaces of the coated components to be inspected. The inspection coupon is coated on all sides in the same manner as the components to be inspected, whereby later analysis of the coupon provides quality assurance of all coated surfaces of the components at once.