Inspection Recipe Generation Using Design Data Segmentation
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Solution Overview
Problem
Current semiconductor inspection methods lack efficient integration of design-related information for accurate defect detection and measurement, particularly in high-resolution and high-speed processes, leading to inconsistencies and inefficiencies in identifying defects on specimens like wafers and micro-fabricated devices.
Innovation Solution
A computerized method and system for generating an inspection recipe that utilizes design data to segment and associate structural elements in test images with corresponding design elements, enabling precise local segmentation and metrology measurements, and includes position calibration to register inspection images in design coordinates, thereby enhancing defect detection and measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If design-related information is integrated into inspection processes to improve defect detection accuracy, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The system performs preliminary segmentation of the inspection area based on design data before actual defect detection. By pre-defining regions of interest and structural elements from design information, the system prepares the inspection framework in advance, allowing accurate defect detection without adding complexity to the core detection algorithms.
Solution Approach 2:
The inspection area is divided into multiple segments or regions of interest based on design data. This segmentation allows the system to focus computational resources on specific areas where defects are more likely to occur or where higher precision is required, improving overall measurement precision while managing system complexity through localized processing.
2Measurement precision
If high-resolution inspection is performed to improve defect detection accuracy, then measurement precision is improved, but productivity decreases
Solution Approach 1:
The system applies different inspection qualities to different regions of the specimen. High-resolution inspection is performed only in identified regions of interest where defects are more likely to occur or where critical structures are located, while other areas receive lower-resolution inspection. This local differentiation maintains high measurement precision for critical areas while improving overall productivity.
Solution Approach 2:
Instead of performing high-resolution inspection across the entire specimen, the system performs partial high-resolution inspection only in necessary regions identified through preliminary analysis of design data. This partial action approach achieves sufficient defect detection accuracy for critical areas without the productivity penalty of full-specimen high-resolution scanning.
3Measurement precision
If frequent and detailed inspection is performed to improve defect detection accuracy, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The system performs preliminary analysis of design data to identify regions of interest and high-risk areas before conducting detailed inspection. This preliminary action allows the system to focus detailed inspection efforts only where needed, reducing the total time required while maintaining high defect detection accuracy in critical regions.
Solution Approach 2:
Different inspection frequencies and detail levels are applied to different regions based on their importance and defect risk. Critical regions identified from design data receive frequent and detailed inspection, while less critical areas receive less frequent or lower-detail inspection, optimizing the balance between measurement precision and inspection time.
Data Source
AI summary
There are provided a method of generating an inspection recipe usable for inspecting an inspection area of a specimen and a recipe generating unit. The recipe generating unit is configured: upon obtaining design data informative of design structural elements comprised in a design PoI corresponding to the at least one PoI, to provide global segmentation of a test image captured by an inspection tool unit from the inspection area and comprising at least one test PoI of substantially the same design as the at least one PoI, thereby to obtain segmented structural elements comprised in the test PoI and segmentation configuration data; to associate the segmented structural elements comprised in the test PoI with the design structural elements comprised in the design PoI, thereby to obtain design association data; and to generate an inspection recipe comprising, at least, segmentation configuration data and design association data.