Inspection Image Simulation Using Parameterized Gray-Level Profiles
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Solution Overview
Problem
Existing physical model-based simulators for scanning charged-particle microscopes (SCPM) are inefficient in generating a sufficient number of simulated inspection images with various patterns, sizes, and densities, and their outputs are not compatible with some metrology tools, making it time-consuming and costly to verify/quantify metrology tool performance.
Innovation Solution
A parameterized SCPM image simulator that generates simulated inspection images using user-defined gray level profile data, incorporating metrology-related parameters, and can simulate complex patterns faster than existing physical model-based simulators.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If physical model-based simulators are used to generate simulated inspection images, then the simulation can be performed with established physical models, but the generation speed is slow and the output is not compatible with some metrology tools
Solution Approach 1:
The patent creates a simplified gray-level profile model that copies the essential visual characteristics of physical model-based simulations without replicating the complex physical calculations. This allows rapid generation of simulated images that maintain visual fidelity while achieving computational efficiency and broader metrology tool compatibility
Solution Approach 2:
The patent transforms the simulation approach by changing from physical parameters (electron beam interactions, material properties) to visual parameters (gray-level profiles, intensity distributions). This parameter transformation enables faster computation while preserving the essential inspection image characteristics needed for metrology verification
2Measurement precision
If physical model-based simulators are used, then the simulation can model complex physical interactions, but it is time-consuming and costly to verify metrology tool performance
Solution Approach 1:
The gray-level profile model creates a simplified copy of the inspection image characteristics that preserves defect detection capabilities while eliminating time-consuming physical calculations, enabling rapid metrology tool verification without sacrificing measurement precision
Solution Approach 2:
The patent pre-calculates and stores gray-level profile data for various pattern types, allowing rapid retrieval and application during simulation. This preliminary preparation eliminates the need for repeated complex physical modeling when verifying metrology tools across multiple test cases
3Adaptability or versatility
If a sufficient number of inspection images with various patterns, sizes, and densities are generated using physical model-based simulators, then metrology tool verification can be performed, but the process is inefficient
Solution Approach 1:
The gray-level profile model serves as a universal simulation approach that can generate inspection images for various patterns, sizes, and densities using a single efficient framework. This eliminates the need for multiple specialized physical models while maintaining adaptability across different inspection scenarios
Solution Approach 2:
The patent enables efficient generation of diverse inspection images by changing from fixed physical models to adjustable gray-level profile parameters. Users can modify pattern, size, and density parameters directly in the gray-level model, achieving high versatility without the computational burden of repeated physical simulations
Data Source
AI summary
An improved method, apparatus, and system for generating a simulated inspection image are disclosed. According to certain aspects, the method comprises acquiring design data including a first pattern, generating a first gray level profile corresponding to the design data, and rendering an image using the generated first gray level profile.