Inspection Jig Segmentation for High Frequency Signal Stability
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Solution Overview
Problem
Existing inspection jigs face challenges in maintaining stable contact and measurement performance for high frequency signals when inspecting semiconductor integrated circuits with a large number of terminals, as shortening spring probes to transmit high frequency signals leads to contact stroke shortages and interference with electronic components.
Innovation Solution
An inspection jig design featuring a rigid substrate with a flexible substrate protrusion, where a short, non-extendable contactor for high frequency signals is combined with a longer, extendable spring probe for non-high frequency signals, supported by a contactor block and crimping mechanism, ensuring sufficient contact stroke and reducing interference with electronic components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If spring probes are shortened to transmit high frequency signals, then measurement performance for high frequency signals is improved, but contact stroke becomes insufficient and interference with electronic components occurs
Solution Approach 1:
The invention divides the probe structure into two distinct segments: a contactor for high frequency signals and a spring probe for non-high frequency signals. The contactor is directly mounted on the rigid substrate without a long spring probe, thereby eliminating the harmful inductance while the spring probe maintains sufficient contact stroke for stable electrical connection.
Solution Approach 2:
Different parts of the probe card are given different structural characteristics tailored to their specific functions. High frequency signal paths use short contactors with minimal inductance, while non-high frequency paths use longer spring probes with adequate contact stroke. This localized optimization resolves the contradiction by allowing each region to have the properties it needs without compromising the other.
2Measurement precision
If contactors are made short for high frequency transmission, then measurement performance is improved, but stable contact becomes difficult to achieve
Solution Approach 1:
The system separates the functions of high frequency signal transmission and stable mechanical contact into two different components: the contactor handles high frequency signals with its short structure, while the spring probe provides stable contact through its extendable structure. This segmentation allows each component to optimize for its specific function without compromise.
3Reliability
If spring probes are extended to ensure stable contact, then contact reliability is improved, but interference with electronic components increases
Solution Approach 1:
The invention segments the probe structure so that only non-high frequency paths use extended spring probes, while high frequency paths use short contactors. This eliminates the harmful inductance effect on high frequency signals while maintaining adequate contact stroke for reliable electrical connection on paths where it is needed.
Solution Approach 2:
The probe card structure is locally optimized for different signal types: short contactors for high frequency signals to minimize inductance, and extended spring probes for non-high frequency signals where contact stroke is more critical. This local differentiation resolves the contradiction by applying the appropriate structure only where it is needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures stable contact and enhanced measurement performance for high frequency signals by maintaining a sufficient contact stroke and preventing interference with electronic components, even with a large number of terminals, while maintaining transmission performance.
Implementation Method 1
An elastic body that is provided between the protruding portion of the flexible substrate and the support, and presses a back surface of a portion of the flexible substrate where the contact portion is provided
Data Source
AI summary
The inspection jig includes a rigid substrate, a flexible substrate connected to the rigid substrate, a contactor block for supporting a part of the flexible substrate in a state that the part of the flexible substrate is protruded with respect to the rigid substrate, a contactor provided on a protruding portion of the flexible substrate, and a spring probe supported by the contactor block, one end of which is in contact with a contact pad provided on a lower surface of the rigid substrate, and the other end of which protrudes from a protruding portion of the flexible substrate.