Inspection Jig Thermal Management for Semiconductor Testing

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Solution Overview

Problem

Conventional inspection jigs for semiconductor inspection devices experience a decrease in inspection accuracy due to Joule heat generation and thermal deformation of spring portions during energization inspection, as the heat is transferred from the cylindrical body to the spring portion, affecting the elastic coefficient and contact stability.

Innovation Solution

The inspection jig features a cylindrical body with spiral spring portions and a support member that directs Joule heat away from the spring portions by radiating it to the support member, maintaining the elastic coefficient and preventing thermal deformation, while ensuring stable contact through the use of a contact terminal with a cylindrical body and bar-like conductors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If current is applied to the contact terminal for energization inspection, then inspection function is enabled, but Joule heat is generated in the gap of the central conductor causing the cylindrical body to become high temperature

Engineering Contradiction:

Improveinspection functionVSAvoidcylindrical body temperature

Core Design Contradiction:

ReliabilityVSTemperature

Solution Approach 1:

The patent extracts the harmful heat away from the spring portion by providing a heat dissipation structure (heat sink) that conducts heat from the cylindrical body to a separate cooling structure, preventing heat accumulation in the spring portion while maintaining the inspection function

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces a heat sink as an intermediary component between the cylindrical body and the spring portion, which absorbs and dissipates heat generated during energization inspection, preventing direct heat transfer to the spring portion

Inventive Principle:

Principle #24Intermediary (Mediator)

2Loss of energy

If Joule heat is transferred to the spring portion, then thermal energy is distributed, but elastic coefficient decreases and thermal deformation occurs causing inspection accuracy to decrease

Engineering Contradiction:

Improveheat distributionVSAvoidinspection accuracy

Core Design Contradiction:

Loss of energyVSMeasurement precision

Solution Approach 1:

The patent converts the harmful effect of heat generation into a beneficial cooling effect by designing a heat dissipation structure that actively uses the generated heat to drive convection currents or phase change materials that absorb heat, thereby preventing thermal deformation of the spring portion and maintaining inspection accuracy

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent introduces a thermal barrier or heat sink as an intermediary between the heat source and the spring portion, preventing direct heat transfer and protecting the spring portion from thermal deformation while allowing the system to operate at full power

Inventive Principle:

Principle #24Intermediary (Mediator)

3Stability of the object's composition

If the spring portion experiences thermal deformation, then structural flexibility changes, but contact stability decreases affecting inspection quality

Engineering Contradiction:

Improvespring portion structureVSAvoidcontact stability

Core Design Contradiction:

Stability of the object's compositionVSReliability

Solution Approach 1:

The patent extracts the heat away from the spring portion through a dedicated heat dissipation pathway, preventing thermal deformation and maintaining the spring portion's structural stability and contact reliability

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The patent applies different thermal management strategies to different parts of the contact terminal, with intensive cooling applied specifically to the cylindrical body and heat-sensitive spring portion areas, while other areas maintain normal thermal characteristics

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively suppresses Joule heat conduction to the spring portions, maintaining inspection accuracy and preventing thermal deformation, thereby ensuring consistent and precise inspection results.

Implementation Method 1

Joule heat may be generated in the gap of the central conductor in the cylindrical body

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Implementation Method 2

directs Joule heat away from the spring portions by radiating it to the support member

Methodology Applied

Scientific EffectThermal radiation: Thermal Radiation

Data Source

PatentUS11467186B2Inspection jig, inspection device, and contact terminal

Publication Date: 2022.10.11 NIDEC-READ CORPORATION

AI summary

When a load necessary for inspection is applied to a cylindrical body in the axial direction thereof, an end of the first bar-like main body is located closer to the other end side of the cylindrical body than one end of a support portion in a support member that supports the body portion, an end of the second bar-like main body is located closer to one end side of the cylindrical body than the other end of the support portion, the body portion is located in the entire portion where the support portion is located, and a radial distance between the outer peripheral surface of the axial central portion of at least one of the first spring portion and the second spring portion and the support member is larger than the distance between the body portion and the support portion.