Inspection Apparatus Light Source Control for Substrate Heating Uniformity
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing inspection apparatuses face challenges in achieving uniform heating of inspection objects, leading to temperature inconsistencies during the inspection of electronic devices on substrates.
Innovation Solution
A control method for an inspection apparatus that involves individually lighting multiple light sources, obtaining temperature distributions, calculating correction values to adjust light output, and applying these corrections to ensure even heating of the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If multiple light sources are used to heat the substrate, then heating coverage is improved, but temperature uniformity deteriorates
Solution Approach 1:
The substrate is divided into multiple heating zones, each controlled by a separate light source. Temperature distributions are measured for each zone individually, and correction values are calculated and applied to each light source to achieve uniform overall heating across the entire substrate surface.
Solution Approach 2:
Different correction values are applied to different light sources based on their individual temperature distribution characteristics. This allows each light source to be optimized for its specific location and heating pattern, compensating for local variations in heating performance.
2Productivity
If light output from light sources is increased to improve heating efficiency, then heating speed is improved, but temperature uniformity deteriorates
Solution Approach 1:
The light output parameters of individual light sources are adjusted by applying correction values to their control commands. This allows optimization of heating efficiency while maintaining temperature uniformity by fine-tuning the output of each light source based on measured temperature distributions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for precise correction of the control command to achieve uniform heating of inspection objects, improving temperature uniformity and efficiency in the inspection process.
Implementation Method 1
a plurality of light sources configured to emit light to heat the substrate
Data Source
AI summary
A control method of an inspection apparatus including a stage on which a substrate having an inspection object to be inspected is mounted and a plurality of light sources configured to emit light to heat the substrate includes: individually lighting the plurality of light sources and obtaining a plurality of first temperature distributions of the substrate; obtaining a second temperature distribution representing a sum of the plurality of first temperature distributions; obtaining one or more correction values for correcting an amount of light output from at least one or more light sources of the plurality of light sources based on the second temperature distribution; and correcting the amount of light output from each of the at least one or more light sources using the one or more correction values.