Inspection System Module Adjustment Using Auxiliary Elements
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Solution Overview
Problem
The conventional adjustment method for inspection systems in semiconductor manufacturing prolongs the lead time before shipment due to the need for assembling and adjusting multiple modules before shipping, which is time-consuming and inefficient.
Innovation Solution
An adjustment method utilizing auxiliary elements such as virtual simulators and jigs to perform preset adjustments on inspection and transfer modules as a single system, allowing for virtual testing and signal simulation, thereby eliminating the need for physical assembly before shipment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If modules are assembled and adjusted before shipment, then system reliability is improved, but lead time is lengthened
Solution Approach 1:
The patent applies preliminary action by performing adjustments on individual modules (inspection modules and transfer module) before they are assembled into the complete system. The control unit executes adjustment programs on each module separately, allowing adjustments to be completed in advance while modules are still disconnected, thus reducing the lead time required after full assembly.
Solution Approach 2:
The patent segments the adjustment process into independent module-level adjustments rather than requiring a complete system assembly for adjustment. Each inspection module and the transfer module can be adjusted independently using their respective adjustment programs, which ensures module-level reliability without requiring the time-consuming process of assembling the entire system before adjustment.
2Manufacturing precision
If modules are assembled into complete system before shipment, then adjustment precision is improved, but device complexity increases
Solution Approach 1:
The control unit executes adjustment programs on each module before the modules are physically connected to form the complete system. This preliminary adjustment ensures that each module is pre-calibrated and configured correctly, maintaining adjustment precision while avoiding the complexity of adjusting the entire assembled system.
Solution Approach 2:
The patent uses virtual copies or simulation models of the modules during the adjustment process. The control unit can perform adjustments based on virtual representations of the modules and their interactions, which allows for precise adjustment planning and verification without requiring the physical assembly of the complete system, thus reducing device complexity while maintaining adjustment precision.
Data Source
AI summary
The inspection system 100 is constructed by assembling inspection modules 10 configured to inspect inspection target objects and a transfer module 20 configured to transfer the inspection target object to the corresponding inspection module. The inspection system 100 is configured to transfer the inspection target objects into the inspection modules by the transfer module and inspect the inspection target objects in sequence. The adjustment method of the inspection system includes preparing an auxiliary element having a preset function of the inspection module 10 or a preset function of the transfer module 20; and adjusting, with respect to an adjustment which needs to be performed after the inspection system is constructed, the transfer module 20, or each of the inspection modules 10 or the inspection modules 10 as a single system by connecting the auxiliary element 60 (70, 80, 90) to the transfer module 20 or the inspection module 10.