Inspection Recipe Verification Using BKM Parameter Limits
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Solution Overview
Problem
Existing semiconductor manufacturing processes require manual verification of newly created inspection recipes, which is inefficient and affects the accuracy of wafer inspection.
Innovation Solution
A recipe verifying server intercepts and automatically checks inputting recipes from inspection apparatuses against best known method (BKM) recipes, generating error reports for parameters that do not meet predetermined limitations, ensuring successful verification before uploading to other apparatuses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual verification of inputting recipes is performed, then inspection accuracy can be maintained, but verification efficiency and productivity deteriorate
Solution Approach 1:
The system performs self-verification by automatically comparing inputting recipes against stored BKM recipes and generating error reports without requiring manual intervention, thereby maintaining inspection accuracy while significantly improving verification efficiency
Solution Approach 2:
The patent replaces the manual mechanical verification process with an automated computer-based system that retrieves BKM recipes from storage, compares parameters automatically, and generates error reports, substituting human labor with computational processes
2Productivity
If automated verification is implemented, then verification efficiency and productivity improve, but system complexity increases
Solution Approach 1:
The verification server performs multiple functions including retrieving BKM recipes, comparing inputting recipes against BKM recipes, generating error reports, and transmitting results, consolidating these operations into a single multi-functional system that manages complexity through integration
Solution Approach 2:
The verification server acts as an intermediary between the inspection apparatus and the BKM recipe storage, mediating the verification process by automatically retrieving standards, performing comparisons, and reporting results without requiring direct human involvement
3Device complexity
If manual verification is performed, then system complexity remains low, but verification time and loss of time increase
Solution Approach 1:
The automated verification system operates continuously and efficiently, retrieving BKM recipes from storage, comparing parameters without interruption, and generating error reports automatically, eliminating the time losses associated with manual verification processes
Data Source
AI summary
A recipe verifying method, a recipe verifying server, and a smart manufacturing controlling system using the same are provided. The recipe verifying method includes the following steps. An inputting recipe having a plurality of inputting parameters is intercepted. The inputting recipe is transmitted from one of the inspection apparatuses. A target best known method (BKM) recipe is searched out from a plurality of candidate BKM recipes according to the inputting recipe. A plurality of predetermined limitations are obtained according to the target BKM recipe. Whether the inputting parameters of the inputting recipe meet the predetermined limitations is determined. An error report is generated, if the inputting parameters of the inputting recipe do not meet the predetermined limitations. At least one error is heighted in the error report.