Semiconductor Inspection Recipe Retrieval for Coordinate Accuracy
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Solution Overview
Problem
The increasing complexity and diversity of semiconductor devices require different coordinate values for each device, leading to a high number of unique recipes, which is time-consuming and labor-intensive to create, and existing methods do not efficiently utilize past recipe data.
Innovation Solution
A recipe creation device that accesses a database to retrieve and adapt measurement conditions and pattern information, allowing for the selection and optimization of existing recipes for new devices based on design data, thereby automating the creation process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If different coordinate values are measured for different devices, then measurement accuracy is improved, but the number of recipes required increases
Solution Approach 1:
The patent applies universality by creating a single standardized recipe format that can be used across multiple different semiconductor devices. Instead of creating unique recipes for each device, the system uses a universal recipe structure with device-specific parameters that can be adapted to measure different coordinate values on various devices, thereby reducing the total number of recipes needed while maintaining measurement accuracy.
Solution Approach 2:
The patent utilizes parameter changes by allowing recipe parameters such as coordinate values, magnification, and measurement conditions to be dynamically adjusted based on the specific device being measured. The recipe template includes configurable parameters that can be modified for different devices without changing the overall recipe structure, enabling the same recipe framework to accommodate varying measurement requirements across different semiconductor devices.
2Measurement precision
If the number of measurement points is increased due to pattern complication, then measurement precision is improved, but recipe creation complexity increases
Solution Approach 1:
The patent applies segmentation by dividing the measurement process into standardized modules or segments that can be independently configured. The recipe is structured with separate sections for different measurement parameters, coordinate systems, and pattern types, allowing complex measurements to be broken down into manageable segments that can be systematically applied to multiple measurement points without increasing overall recipe complexity.
Solution Approach 2:
The patent implements preliminary action by pre-defining standardized measurement templates, coordinate systems, and measurement conditions that can be applied to multiple measurement points. Instead of creating individual measurement configurations for each point, the system establishes measurement frameworks in advance that can be automatically applied and adjusted for complex patterns, reducing the effort required to handle increased measurement point requirements.
3Ease of manufacture
If past recipe data is not utilized, then recipe creation is simple, but time and effort to create recipes increases
Solution Approach 1:
The patent applies copying by enabling the system to store and retrieve standardized measurement patterns, coordinate systems, and measurement conditions from a database of past recipe data. When creating a new recipe, the system can copy and adapt existing measurement configurations from previous devices or similar patterns, significantly reducing the time and effort required for recipe creation while maintaining measurement accuracy through proven configurations.
Solution Approach 2:
The patent implements preliminary action by pre-processing and storing measurement data, coordinate information, and measurement conditions in a structured database during previous measurements. This preliminary organization of data allows rapid retrieval and reuse of relevant information when creating new recipes, eliminating the need to start from scratch and reducing recipe creation time without sacrificing simplicity.
Data Source
AI summary
The purpose of the present invention is to provide a recipe creation device, with the goal of using past recipe data in order to highly efficiently create recipes. As an embodiment with which to achieve this goal, there is provided a recipe creation device comprising an arithmetic processing device that, on the basis of design data for a semiconductor element, establishes measurement conditions or inspection conditions by a semiconductor measurement device or a semiconductor inspection device, wherein the arithmetic processing device is configured to be able to access a database in which the measurement conditions or inspection conditions, and the pattern information of the semiconductor element, are stored in associated form, and the measurement conditions or inspection conditions are selected through a search using pattern information of the semiconductor element.