Inspection Stage with Integrated Cooling and Heating for Load Resistance
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Solution Overview
Problem
Existing stage designs for inspection apparatuses face challenges in withstanding the load applied during electrical characteristic inspections of semiconductor wafers, which can lead to displacement and hinder the inspection process due to inadequate structural reinforcement and heat management.
Innovation Solution
The stage incorporates a first cooling plate with a coolant flow path, a heating source with light emitting elements, a transparent resin layer to seal and reinforce the heating source, and a second cooling plate with a coolant flow path, along with a transparent member to efficiently transmit light and heat, ensuring structural integrity and efficient heat management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a conventional stage design is used, then the structure is simple, but it cannot withstand the load applied during inspection and leads to displacement
Solution Approach 1:
The heating source and cooling plates are merged into a single integrated stage structure. The heating source is mounted between the first and second cooling plates, forming a unified assembly that provides both thermal management and mechanical support functions simultaneously, thereby increasing load bearing capacity without proportionally increasing structural complexity
Solution Approach 2:
The stage uses a composite structure combining transparent resin material with cooling plates and heating elements. The transparent resin layer bonds the cooling plates and heating source together, creating a composite assembly that distributes mechanical loads across multiple components, enhancing overall structural strength and displacement resistance
2Temperature
If the heating source is exposed, then heat transmission is efficient, but the heating source is damaged and light transmission is insufficient
Solution Approach 1:
A transparent resin layer is introduced as an intermediary between the heating source and the external environment. This resin layer protects the heating source from damage while maintaining transparency to allow light transmission, and simultaneously maintains thermal contact with the heating source to preserve heating efficiency
Solution Approach 2:
The transparent resin layer acts as a protective thin film covering the heating source. This film provides mechanical protection and environmental sealing while maintaining optical transparency and thermal conduction, allowing the heating source to operate efficiently without direct exposure to damaging conditions
3Temperature
If cooling is not provided, then the structure is simpler, but heat accumulation occurs and affects inspection accuracy
Solution Approach 1:
The cooling function is merged with the structural stage components by incorporating cooling plates directly into the stage assembly. The first and second cooling plates form part of the stage structure itself, providing both mechanical support and thermal management functions simultaneously
Solution Approach 2:
Coolant flow paths are introduced as intermediary channels within the cooling plates. These flow paths allow coolant to circulate through the stage structure, acting as a thermal intermediary that absorbs heat from the heating source and inspection object, maintaining temperature control without adding external cooling equipment
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables the stage to withstand the applied load, suppress displacement, and maintain the temperature of the inspection object within a predetermined range, enhancing the stability and throughput of the inspection process.
Implementation Method 1
a heating source mounted on the first cooling plate and including a plurality of light emitting elements so as to heat the inspection object
Implementation Method 2
a transparent member provided on the heating source and transmitting light output from the heating source
Implementation Method 3
a first cooling plate including a first coolant flow path formed therein, a second cooling plate provided on the transparent member so as to hold the inspection object and including a second coolant flow path formed therein
Data Source
AI summary
A stage on which an inspection object having an electronic device against which a contact terminal of a probe card of an inspection apparatus is pressed by a load applied thereto is placed, includes a first cooling plate including a first coolant flow path formed therein, a heating source mounted on the first cooling plate and including a plurality of light emitting elements so as to heat the inspection object, a transparent member provided on the heating source and transmitting light output from the heating source, a second cooling plate provided on the transparent member so as to hold the inspection object and including a second coolant flow path formed therein, and a transparent resin layer filled between the first cooling plate and the transparent member so as to cover the heating source.