Inspection Unit for Substrate Treatment Nozzle Discharge
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Solution Overview
Problem
Current inspection methods for nozzle discharge in substrate treatment processes face challenges due to light scattering and distortion, making precise inspection difficult, especially when the camera and light source are not aligned optimally.
Innovation Solution
An inspection unit is designed with a transparent plate, a light source, a diffusion preventing plate with a slit, and a photographing member that rotates and positions to ensure perpendicular light and image capture directions, using a laser for precise light control and image analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If light is irradiated to inspect nozzle discharge, then the discharge state can be detected, but light scattering occurs causing image distortion and inspection errors
Solution Approach 1:
A transparent plate is introduced as an intermediary medium between the light source and the discharge inspection area. The plate redirects scattered light back toward the photographing member, preventing light loss and reducing image distortion caused by scattering, thereby improving inspection precision without requiring changes to the fundamental optical inspection approach
Solution Approach 2:
The invention converts the harmful effect of light scattering into a beneficial phenomenon by positioning the transparent plate to reflect scattered light back into the optical path. This causes previously lost scattered light to contribute to image formation, improving image quality and inspection accuracy while maintaining the simple optical inspection configuration
2Ease of operation
If camera and light source are positioned beside the nozzle, then inspection can be performed, but images from distant sites are distorted due to light spreading
Solution Approach 1:
The transparent plate serves as an optical intermediary that collects and redirects scattered light from distant discharge sites back toward the photographing member. This extends the effective inspection range while maintaining image accuracy, allowing the camera and light source to remain in convenient beside positions without suffering from light spreading distortion
Solution Approach 2:
The transparent plate introduces a new optical dimension by reflecting light from multiple angles and positions back into the primary optical path. This allows the system to capture discharge information from various spatial locations while maintaining consistent image quality, effectively adding dimensional flexibility to the inspection geometry
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This setup enhances the precision and effectiveness of the inspection process by restricting light width and preventing distortion, allowing for accurate determination of normal liquid discharge from the nozzle.
Implementation Method 1
a light source member that irradiates light onto a path of the treatment liquid discharged from the treatment liquid nozzle towards the plate
Implementation Method 2
a photographing member situated below the plate
Data Source
AI summary
A substrate treating apparatus includes a treatment unit including a container, and a support member in the interior of the container to support a substrate, the treatment unit being configured to treat the substrate a nozzle unit having a treatment liquid nozzle for supplying a treatment liquid to the substrate provided in the treatment unit and an inspection unit that inspects whether the treatment liquid is normally discharged from the treatment liquid nozzle. The nozzle further includes a nozzle driver that moves the treatment liquid nozzle from a process position at which the substrate is treated by the treatment unit and an inspection position at which the treatment liquid nozzle is inspected by the inspection unit.