Inspection System Single Aligner Shared Space
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Solution Overview
Problem
Existing inspection systems for electronic devices face challenges in reducing their footprint while maintaining accurate alignment and inspection efficiency, particularly due to the need for multiple aligners that increase space requirements.
Innovation Solution
The inspection system incorporates a single aligner within a common alignment space that supports multiple testers, using a fixing device with pins and an elevating mechanism to maintain the position of each tester relative to the aligner, allowing for precise alignment and reduced space usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple aligners are used to support multiple testers, then each tester can be independently aligned, but the footprint of the inspection system increases
Solution Approach 1:
The patent merges multiple aligners into a single shared aligner that serves multiple testers. The aligner is positioned in a common alignment space that is accessible by all testers, allowing them to share the same alignment resource rather than each having a dedicated aligner.
Solution Approach 2:
The patent introduces a movable supporting device that can dynamically adjust its position to support different testers as they are transferred into the alignment space. The supporting device moves along with the tester transfer, enabling the single aligner to serve multiple testers sequentially.
2Area of stationary object
If a single aligner is shared by multiple testers, then the footprint is reduced, but the position of testers with respect to the aligner must be precisely controlled
Solution Approach 1:
The patent introduces a supporting device as an intermediary between the testers and the single aligner. This supporting device facilitates the positioning and support of testers relative to the aligner, enabling precise position control without requiring complex direct coupling between each tester and the aligner.
Solution Approach 2:
The supporting device is designed with universal functionality to support any tester transferred into the alignment space. It can adapt to different testers while maintaining precise positional control relative to the single aligner, serving multiple purposes across different testing operations.
3Adaptability or versatility
If testers are transferred to a common alignment space, then space utilization is improved, but the complexity of positioning and fixing testers increases
Solution Approach 1:
The supporting device is configured to automatically follow and support the tester as it is transferred into the alignment space. The device moves in coordination with the tester transfer process, reducing the need for complex external positioning mechanisms and enabling the system to self-adjust during the transfer operation.
Data Source
AI summary
An inspection system configured to inspect a device within a substrate is provided. The inspection system includes an inspection module, an alignment module, a supporting device and a fixing device. The inspection module has multiple testers and multiple inspection chambers. The multiple testers are allowed to be accommodated in the multiple inspection chambers, respectively. The alignment module has an aligner. The aligner is placed in an alignment space. The aligner is configured to adjust a position of the substrate to be inspected with respect to one tester of the multiple testers, which is accommodated in the alignment space. The supporting device is configured to support the tester accommodated in the alignment space from below. The fixing device is configured to fix the tester accommodated in the alignment space in cooperation with the supporting device.