Insulating Layer Angles Prevent Step Disconnection and Leak Current

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Solution Overview

Problem

Existing semiconductor apparatuses, such as light emitting and photoelectric conversion devices, face issues with step disconnection and leak currents due to the shape of insulating films between electrodes, which affect the integrity and efficiency of organic layers.

Innovation Solution

A semiconductor apparatus design featuring an insulating layer with specific angled side surfaces and varying lengths, which covers the end of a lower electrode and separates it from an upper electrode via a functional layer, preventing step disconnection and leak currents by controlling the film thickness and resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an insulating layer with a conventional shape (as discussed in PTL1) is used to prevent step disconnection, then step disconnection is prevented, but leak current is generated between electrodes

Engineering Contradiction:
Improvestep disconnection preventionVSAvoidleak current
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The insulating layer is designed with different inclination angles in different regions: a first inclined portion with 45°-90° angle and a second inclined portion with 0°-45° angle. This local variation in geometric properties prevents step disconnection in the first portion while controlling leak current in the second portion, thus resolving the contradiction between reliability and harmful factors.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The insulating layer is divided into multiple portions with different inclination angles. The first inclined portion (45°-90°) and second inclined portion (0°-45°) are segmented to perform different functions: one for preventing step disconnection and the other for controlling leak current, thereby resolving the technical contradiction.

Inventive Principle:
Principle #1Segmentation

2Stability of the object's composition

If the insulating layer is designed to prevent step disconnection, then organic layer integrity is maintained, but film thickness becomes insufficient in certain regions leading to leak current

Engineering Contradiction:
Improveorganic layer integrityVSAvoidfilm thickness control
Core Design Contradiction:
Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

By creating different inclination angles in different portions of the insulating layer, the design ensures adequate film thickness in the second inclined portion (0°-45°) where leak current occurs, while maintaining organic layer integrity in the first inclined portion (45°-90°) where step disconnection is prevented.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS11687117B2Semiconductor apparatus, display apparatus, photoelectric conversion apparatus, electronic device, illumination apparatus, and movable body
Publication Date: 2023.06.27 CANON KK
  • US11687117B2 patent drawing
  • US11687117B2 patent drawing
  • US11687117B2 patent drawing

AI summary

A semiconductor apparatus include a first electrode, an insulating layer covering an end of the first electrode, a functional layer arranged on the first electrode and the insulating layer, and a second electrode arranged above the functional layer, wherein, in a cross-section passing through the insulating layer, and the first electrode, the insulating layer includes a first portion having a side surface inclining at an angle of 45° or more and 90° or less, a second portion having a side surface inclining at an angle smaller than 45°, and a third portion below the first portion, and having a side surface inclining at an angle smaller than 45°, and wherein a length of the second portion in a direction vertical to the first electrode is larger than that of the third portion.