Insulating Liquid Cooling for Compact High-Voltage Pulsed Power
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Solution Overview
Problem
High power, high voltage pulsed power supplies for plasma processing face challenges in maintaining small dimensions while ensuring reliable insulation and cooling due to high voltage and current rise slopes, leading to unpredictable failures from gas bubble formation in cooling liquids.
Innovation Solution
An electronic device with a container filled with an electrically insulating heat transfer liquid, maintained in a hermetically closed volume at a regulated pressure, and equipped with a degassing unit to remove dissolved gases, ensuring consistent temperature distribution and reduced bubble formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If electrical components are packed close together to reduce dimensions, then the device size is reduced, but insulation reliability deteriorates due to high voltages
Solution Approach 1:
The patent changes the physical state and properties of the cooling medium by regulating pressure within a specific range (1 bar to 10 bar) to prevent gas bubble formation. This pressure parameter change ensures the liquid maintains optimal insulating properties while allowing compact component packaging without compromising insulation reliability
Solution Approach 2:
The patent creates an inert environment by using a hermetically sealed container filled with pressurized liquid that excludes gas bubbles. This inert liquid environment provides reliable electrical insulation between closely packed high-voltage components, eliminating the insulation problems that would otherwise arise from compact packaging
2Temperature
If cooling liquid is used for direct contact cooling, then cooling efficiency is improved, but reliability deteriorates due to gas bubble formation causing unpredictable failures
Solution Approach 1:
The patent applies preliminary anti-action by preemptively preventing gas bubble formation through pressure regulation before bubbles can form and cause failures. By maintaining pressure within the specified range, the system prevents the harmful effect of bubbles that would otherwise disrupt cooling and cause operational failures
Solution Approach 2:
The patent implements feedback control by continuously monitoring and regulating the pressure of the cooling liquid to maintain it within the optimal range. This feedback mechanism ensures that pressure adjustments are made in response to changing conditions, preventing bubble formation while maintaining effective cooling
3Reliability
If pressure is increased to prevent bubble formation, then reliability is improved, but device complexity increases due to pressure regulation requirements
Solution Approach 1:
The patent applies self-service by designing a system where the cooling liquid's own pressure, when regulated within the specified range, automatically prevents bubble formation. The pressurized liquid environment inherently resists bubble formation, reducing the need for complex active pressure control mechanisms while maintaining reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides reliable and efficient cooling with reduced failure rates, maintaining insulation and balancing electrical components' temperatures, enhancing the stability and reliability of the power supply.
Implementation Method 1
an electrically insulating heat transfer liquid, filled within the container and having direct contact to the plurality of electrical components and configured to transport heat away from the plurality of electrical components
Implementation Method 2
The electrically insulating heat transfer liquid is enclosed in a hermetical closed volume, the hermetical closed volume being arranged at least partly inside the container and kept in a predetermined regulated pressure range
Data Source
AI summary
An electronic device for a high power, high voltage pulsed power supply for plasma processing for biasing a substrate in a plasma process, the electronic device including a plurality of electrical components configured to generate heat when the device is in use and a container. At least a part of the plurality of electrical components are placed in the container. The electronic device further includes an electrically insulating heat transfer liquid, filled within the container and having direct contact to the plurality of electrical components and configured to transport heat away from the plurality of electrical components. The electrically insulating heat transfer liquid is enclosed in a hermetical closed volume, the hermetical closed volume being arranged at least partly inside the container and kept in a predetermined regulated pressure range.