Detection Element Insulation Recess for Gas Diffusion Resistance
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Solution Overview
Problem
The performance of detection elements in electronic devices is affected by the influence of water or gas during the manufacturing process, leading to potential changes in their characteristics.
Innovation Solution
The design includes a first insulation layer with a recess that does not overlap with the conductive layer, featuring varying thicknesses to reduce the diffusion of gases such as hydrogen and oxygen ions, thereby protecting the active element.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a complete insulation layer is formed over the active element, then the active element is well protected from water and gas, but the manufacturing process becomes more complex and time-consuming
Solution Approach 1:
The insulation layer is designed with different thicknesses in different regions: a first thickness in the first region (over the active element) and a second thickness in the second region, where the second thickness is less than the first thickness. This local variation provides enhanced protection where needed while simplifying the overall structure and reducing manufacturing complexity.
Solution Approach 2:
The insulation layer is segmented into multiple regions with different thickness characteristics. The first region provides thick insulation over the active element for maximum protection, while the second region has reduced thickness, creating a segmented structure that balances protection with manufacturing feasibility.
2Ease of manufacture
If the insulation layer thickness is reduced to simplify manufacturing, then the manufacturing process becomes easier, but the protection against gas diffusion to the active element is compromised
Solution Approach 1:
The insulation layer implements local quality by having a first thickness in the first region (over the active element) that is greater than the second thickness in the second region. This ensures that the critical area near the active element has sufficient thickness to prevent gas diffusion, while other areas have reduced thickness for manufacturing ease.
Solution Approach 2:
The insulation layer is segmented into a first region with greater thickness for protection and a second region with lesser thickness for manufacturing simplicity. This segmentation allows the structure to meet both protective and manufacturing requirements simultaneously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the reliability of the electronic device by minimizing the impact of gases on the active element, maintaining its performance and characteristics.
Implementation Method 1
performing an etching process on a region of the first insulation layer which is not overlapping with the conductive layer to form a recess
Data Source
AI summary
An electronic device is provided. The electronic device includes a substrate, an active element, a first insulation layer, and a detection element. An active element is disposed on the substrate. A first insulation layer is disposed on the active element. A detection element is disposed on the first insulation layer. The detection element comprises a lower electrode disposed on the first insulation layer, an active layer disposed on the lower electrode, an upper electrode disposed on the active layer, and the lower electrode is a part of a conductive layer. The first insulation layer has a recess, and the recess does not overlap with the conductive layer in a normal direction of the substrate.