Integrated Actuator Manifold for Compact Multi-Valve Fluid Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing fluid distribution systems with multiple valves require complex assembly and numerous connections, leading to increased size and potential leak points, particularly in applications like semiconductor wafer manufacturing where compact and reliable fluid control is crucial.
Innovation Solution
A manifold-based system with a unitary actuator housing and integrated actuator cavities, where actuating mechanisms are disposed within a single block, simplifying fluid supply and reducing the need for additional passages and seals, and featuring a sensor manifold for position detection and manual adjustment capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple valves are arranged in separate assemblies, then each valve can be independently controlled, but the overall system size increases and assembly complexity increases
Solution Approach 1:
The patent combines multiple valve assemblies into a single integrated manifold body where multiple valve cavities are formed within one monolithic structure. The manifold body includes multiple end connections, end ports, and valve cavities that are all integrated into a single component, eliminating the need for separate valve bodies and reducing overall system size while maintaining independent control of each valve through individual actuators.
Solution Approach 2:
The manifold body serves multiple functions simultaneously: it acts as a structural support, provides fluid distribution pathways through integrated passages, houses multiple valve cavities, and enables independent control of each valve. This multi-functional design reduces the number of separate components needed while maintaining the ability to independently control each valve for mixing, switching, and purging operations.
2Adaptability or versatility
If multiple separate valve assemblies are used, then each valve can be independently actuated, but the number of connections and potential leak points increases
Solution Approach 1:
By integrating multiple valve cavities and fluid passages into a single monolithic manifold body, the patent reduces the number of external connections and joints required. The internal passages are formed within the solid manifold structure, eliminating the need for external piping and connections between separate valve assemblies, thereby reducing potential leak points while maintaining independent actuation of each valve.
3Adaptability or versatility
If complex valve arrangements are implemented, then fluid control capabilities are enhanced, but assembly complexity and manufacturing difficulty increase
Solution Approach 1:
The patent integrates multiple valve cavities, end connections, and fluid passages into a single manifold body that can be manufactured as one piece using additive manufacturing or other monolithic fabrication techniques. This integration simplifies assembly by eliminating the need to assemble multiple separate valve bodies and connections, while still providing enhanced fluid control capabilities through the integrated multi-cavity design.
Solution Approach 2:
The patent utilizes additive manufacturing technology to create complex internal geometries and passages within the manifold body that would be difficult or impossible to achieve with traditional manufacturing methods. This enables the creation of optimized fluid pathways and valve cavity arrangements that enhance control capabilities while simplifying the overall assembly process through monolithic construction.
Data Source
AI summary
An actuator assembly includes a unitary actuator housing, a plurality of pilot valves, and a plurality of actuating members. The actuator housing defines a plurality of actuator cavities and a plurality of internal passages each extending from a corresponding actuation ports on the actuator housing to a corresponding one of the actuator cavities, and an internal pressurization passage extending from a single supply port on the actuator housing to a plurality of branch ports each adjacent a corresponding one of the actuation ports. The pilot valves each have an inlet port coupled to a corresponding branch port and an outlet port coupled to a corresponding actuation port. The actuating members are disposed in the corresponding actuator cavities and are movable within the actuator cavities in response to fluid pressurization of the single supply port and movement of the corresponding pilot valve to an open position.