Integrated Barometric Pressure and Humidity Capacitive Sensor
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Solution Overview
Problem
Current sensors face challenges in integrating multiple functions, such as barometric pressure and humidity sensing, due to different manufacturing and packaging processes, leading to process constraints and increased costs.
Innovation Solution
A barometric pressure sensor is developed with a base substrate featuring a first capacitor with a humidity-sensitive insulating layer and a second capacitor that deforms under barometric pressure, allowing for simultaneous measurement of humidity and pressure through capacitance variations, integrated into a single device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If separate sensors are used for barometric pressure and humidity measurement, then measurement functions are complete, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent combines barometric pressure sensing and humidity sensing functions into a single integrated sensor device. The sensing structure includes a sensing layer, support layer, and electrode system that simultaneously detect both barometric pressure changes and humidity changes, eliminating the need for separate sensors and reducing device complexity.
Solution Approach 2:
The sensing structure is designed with multi-functionality to perform both barometric pressure measurement and humidity measurement. The sensing layer material and structure are configured to respond to both pressure changes and humidity changes, allowing a single device to serve multiple measurement purposes.
2Measurement precision
If separate sensors are used for barometric pressure and humidity measurement, then measurement accuracy is maintained, but manufacturing process complexity increases
Solution Approach 1:
The patent integrates the manufacturing processes for barometric pressure sensing and humidity sensing into a single unified process. The sensing layer, support layer, and electrode structures are formed simultaneously using the same fabrication steps, including photolithography, sputtering, and etching, thereby maintaining measurement precision while simplifying the manufacturing process.
Solution Approach 2:
The patent utilizes parameter changes in the sensing layer material properties to enable both pressure and humidity sensitivity. By selecting materials with specific dielectric properties and configuring the layer structure, the sensor responds to both pressure-induced thickness changes and humidity-induced dielectric constant changes, achieving dual-functionality through material parameter optimization.
3Adaptability or versatility
If multiple sensors are integrated, then monitoring capability is enhanced, but packaging process complexity increases
Solution Approach 1:
The patent merges the packaging requirements for barometric pressure and humidity sensors into a single packaging structure. The integrated sensing device is packaged in a unified hermetic seal that protects both sensing functions, eliminating the need for separate packaging processes and reducing overall packaging complexity.
4Measurement precision
If separate sensors are used, then each sensor can be optimized independently, but overall device size increases
Solution Approach 1:
The patent combines the sensing elements for barometric pressure and humidity into a single integrated structure with overlapping or adjacent sensing areas. The sensing layer and electrode configurations are designed to share common structural elements, reducing the total device area compared to separate sensors while maintaining optimization for both measurement functions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This integration enables miniaturization, reduces manufacturing steps, and improves detection accuracy and sensitivity by utilizing a single device for multi-point monitoring, saving costs and simplifying processes.
Implementation Method 1
a dielectric constant of the first insulating layer may vary with different humidity environments, so that a capacitance value of the first capacitor varies
Implementation Method 2
the second top electrode may deform under an action of external barometric pressure, so that a capacitance value of the second capacitor varies
Data Source
AI summary
Disclosed are a barometric pressure sensor and a method for preparing the same, and an electronic device, which relate to the technical field of sensors. The barometric pressure sensor includes a base substrate, and a first capacitor provided on a side of the base substrate. The first capacitor includes a first bottom electrode provided close to the base substrate; a first insulating layer provided on a side of the first bottom electrode away from the base substrate; and a first top electrode provided on a side of the first insulating layer away from the base substrate. The first top electrode is provided with a first opening which is configured to expose the first insulating layer at a corresponding position. A dielectric constant of the first insulating layer may vary with different humidity environments, so that a capacitance value of the first capacitor varies.