Integrated Base Block Fluid Control Apparatus Assembly

Solution Overview

Problem

Conventional fluid control apparatuses for semiconductor manufacturing require burdensome processes for positioning and maintaining fluid control devices, leading to inefficiencies in assembly and maintenance due to the large number of members and complex configurations.

Innovation Solution

The apparatus categorizes fluid control devices into those with and without base blocks, allowing frequent replacements to be individually extracted and maintained, while less frequently replaced devices are integrated without separate base blocks, reducing the number of members and simplifying assembly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If fluid control devices are integrated by placing them in series and connecting without pipes and joints, then the space occupied is reduced and flow channel volumes are reduced, but the number of members increases leading to burdensome positioning processes

Engineering Contradiction:

Improvespace occupiedVSAvoidnumber of members

Core Design Contradiction:

Area of stationary objectVSDevice complexity

Solution Approach 1:

The patent merges the base block and the fluid control device main body into a single integrated structure. The base block is formed as an integral part of the main body, eliminating the need for separate base blocks and reducing the total number of members while maintaining the compact series arrangement that reduces overall space occupation.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The integrated base block serves multiple functions: it provides structural support, forms sealing surfaces for adjacent devices, and integrates the flow channel structure. This multi-functionality reduces the number of separate components needed while maintaining the compact design that reduces space occupation.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Volume of stationary object

If fluid control devices are integrated by placing them in series and connecting without pipes and joints, then the flow channel volumes are reduced, but the number of members increases leading to burdensome positioning processes

Engineering Contradiction:

Improveflow channel volumesVSAvoidnumber of members

Core Design Contradiction:

Volume of stationary objectVSDevice complexity

Solution Approach 1:

The patent merges the base block and the fluid control device main body into a single integrated structure. The base block is formed as an integral part of the main body, eliminating the need for separate base blocks and reducing the total number of members while maintaining the compact series arrangement that reduces overall space occupation.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The integrated base block serves multiple functions: it provides structural support, forms sealing surfaces for adjacent devices, and integrates the flow channel structure. This multi-functionality reduces the number of separate components needed while maintaining the compact design that reduces space occupation.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Ease of manufacture

If fluid control devices are positioned to straddle adjacent joint members, then integration is achieved, but burdensome processes are required for positioning the devices

Engineering Contradiction:

Improveassembling operation efficiencyVSAvoidpositioning processes

Core Design Contradiction:

Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent merges the base block and the fluid control device main body into a single integrated structure. The base block is formed as an integral part of the main body, eliminating the need for separate base blocks and reducing the total number of members while maintaining the compact series arrangement that reduces overall space occupation.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

Instead of positioning the fluid control device to straddle separate base blocks and joint members, the patent inverts the approach by making the base block an integral part of the device itself. This eliminates the need for complex positioning processes to align multiple separate components.

Inventive Principle:

Principle #13The other way round (Inversion)

Data Source

PatentUS8434522B2Fluid control apparatus

Publication Date: 2013.05.07 FUJIKIN INC

AI summary

There is provided a fluid control apparatus which can reduce the number of members and can improve the assembling operation efficiency.A pressure indication device 4 to be replaced with a relatively-higher frequency is coupled to a base block 5 existing thereunder through male screw members 17 from above. An on-off valve 6 to be replaced with a relatively-lower frequency has, at its lower portion, a block-shaped main body 6a formed integrally therewith. The main body 6a of the on-off valve 6 is coupled to the base block 5 through male screw members 18 in the forward and rearward directions.